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 | Assembly & Packaging Committee |
| |
| TFOF | | | | | Packaging 5 Year Review Task Force | |
| Compound Semiconductor Materials Committee |
| |
| SNARF | | | | | Doc 4562 - Reapproval for SEMI M46; Test Method for Measuring Carrier Concentrations in Epitaxial Layer Structures by Electrochemical Capacitance Voltage (ECV) Profiling | |
| SNARF | | | | | Doc 4618 - Developing a new standard for determination of carbon in GaAs | |
| SNARF | | | | | Doc 4619 - Withdrawal of M30-0997 document | |
| SNARF | | | | | Doc 4634 - Contactless capacitive resistivity measurement of semi-insulating semiconductors | |
| TFOF | | | | | Contactless capacitive resistivity measurement of semi-insulating semiconductors | |
| EH&S Committee |
| |
| SNARF | | | | | Doc 4604 - Changes to S8, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment, related to manual material handling assessments | |
| SNARF | | | | | Doc 4605 - Delayed Line Item Revisions to SEMI S22 | |
| SNARF | | | | | Doc 4625 - Ventilation Line Item changes to S2 | |
| Facilities Committee |
| |
| SNARF | | | | | Doc 4615 - Revision to SEMI F80, TEST METHOD FOR DETERMINATION OF GAS CHANGE/PURGE EFFICIENCY OF GAS DELIVERY SYSTEM | |
| Flat Panel Display (FPD) - Color Filter & Optical Elements Committee |
| |
| SNARF | | | | | Doc 4646 - Revision to SEMI D22: Test Method for Determination of Color, Transmittance of FPD Color Filter Assemblies | |
| SNARF | | | | | Doc 4647 - Revision to D34-0703: Test Method for FPD Polarizing Films | |
| SNARF | | | | | Doc 4648 - New Standard: Test Method of Surface Scrubbing for FPD Polarizing Film and its Materials | |
| Gases Committee |
| |
| SNARF | | | | | Doc 4623 - Revision of SEMI F73-1102, Test Method For Scanning Electron Microscopy (SEM) Evaluation Of Wetted Surface Condition Of Stainless Steel Components | |
| SNARF | | | | | Doc 4630 - Reapproval of SEMI E69-0298 (Reapproved 1103) - Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers | |
| SNARF | | | | | Doc 4631 - Reapproval of SEMI E68-0997 (Reapproved 1103) - Test Method for Determining Warm-Up Time of Mass Flow Controllers | |
| SNARF | | | | | Doc 4632 - Reapproval of SEMI E56-1104 - Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers | |
| SNARF | | | | | Doc 4633 - Reapproval of SEMI E12-0303 - Standard for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers | |
| SNARF | | | | | Doc 4636 - 5 year review of SEMI F72-1102
TEST METHOD FOR AUGER ELECTRON SPECTROSCOPY (AES) EVALUATION OF OXIDE LAYER OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS | |
| Information & Control Committee |
| |
| SNARF | | | | | Doc 4591 - SPECIFICATION FOR AMHS SEM with transport and storage capabilities | |
| SNARF | | | | | Doc 4595 - Revisions to:
SEMI E138, XML Semiconductor Common Components
SEMI E125, Specification for Equipment Self Description (EqSD)
SEMI E125.1, Specification for SOAP Binding for Equipment Self Description (EqSD)
SEMI E134, Specification for Data Collection Management
SEMI E134.1, Specification for Soap Binding of Data Collection Management (DCM) | |
| SNARF | | | | | Doc 4596 - Revisions to:
SEMI E128, Provisional Specification for XML Message Structures
SEMI E125.1, Specification for SOAP Binding for Equipment Self Description (EqSD)
SEMI E132.1, Specifcation for SOAP Binding for Equipment Client Authentication and Authorization (ECA)
SEMI E134.1, Specification for Soap Binding of Data Collection Management (DCM)
SEMI E147, Guide for Equipment Data Acquisition (EDA) | |
| SNARF | | | | | Doc 4613 - New Standard: Guide for Understanding Data Quality | |
| SNARF | | | | | Doc 4626 - Revision to SEMI E87, Specification for Carrier Management | |
| SNARF | | | | | Doc 4627 - Revision to SEMI E40, Standard for Processing Management | |
| SNARF | | | | | Doc 4628 - Revisions to SEMI E134, Specification for Data Collection Management and SEMI E134.1, Specification for Soap Binding of Data Collection Management (DCM) | |
| SNARF | | | | | Doc 4629 - Revisions to SEMI E125, Specification for Equipment Self Description (EqSD) and SEMI E125.1, Specification for SOAP Binding for Equipment Self Description (EqSD) | |
| SNARF | | | | | Doc 4637 - Reapproval: E98.1 Provisional Specification for SECS-II Protocol for the Object Based Equipment Model | |
| Liquid Chemicals Committee |
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| TFOF | | | | | F57 Revision Task Force | |
| Metrics Committee |
| |
| SNARF | | | | | Doc 4285 - SEMI E114-0302E, Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems | |
| SNARF | | | | | Doc 4638 - E115-0302, Test Method for Determining the Load Impedance and Efficiency of Matching Networks used in Semiconductor Processing Equipment – RF Power Delivery Systems | |
| Micropatterning Committee |
| |
| SNARF | | | | | Doc 4523 - Revision to SEMI P45, SPECIFICATION FOR JOBDECK DATA FORMAT FOR VSB MASK WRITERS | |
| SNARF | | | | | Doc 4527 - Revision to SEMI P44, SPECIFICATION FOR OPEN ARTWORK SYSTEM INTERCHANGE STANDARD (OASIS) SPECIFIC TO VSB MASK WRITERS | |
| Physical Interfaces & Carriers Committee |
| |
| SNARF | | | | | Doc 4639 - Next Generation Carrier Hand-off | |
| SNARF | | | | | Doc 4640 - Revisions to:
SEMI E19.1, Port Standard for Mechanical Interface of Wafer Cassette Transfer, 100 mm (4 inch) Port
SEMI E19.2, Port Standard for Mechanical Interface of Wafer Cassette Transfer, 125 mm (5 inch) Port
SEMI E19.3, Port Standard for Mechanical Interface of Wafer Cassette Transfer, 150 mm (6 inch) Port | |
| SNARF | | | | | Doc 4641 - Revisions to:
SEMI E1, Specification for 3 inch, 100 mm, 125 mm, and 150 mm Plastic and Metal Wafer Carriers
SEMI E1.1, Standard for 3 inch Plastic and Metal Wafer Carriers, General Usage
SEMI E1.2, Standard for 100 mm Plastic and Metal Wafer Carriers, General Usage
SEMI E1.3, Standard for 125 mm Plastic and Metal Wafer Carriers, General Usage
SEMI E1.4, Standard for 125 mm Plastic and Metal Wafer Carriers, Auto Transport Usage
SEMI E1.5, Standard for 150 mm Plastic and Metal Wafer Carriers, General Usage | |
| SNARF | | | | | Doc 4642 - Revisions to:
SEMI E21.1, Cluster Tool Module Interface 300 mm: Mechanical Interface and Wafer Transport Standard
SEMI E22.1, Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume Standard | |
| Silicon Wafer Committee |
| |
| SNARF | | | | | Doc 4209 - New Standard: Test Method for Quantifying Wafer Edge Geometry Using a Curvature Metric | |
| SNARF | | | | | Doc 4614 - Revision to M38,Specifications for Polished Reclaimed Silicon Wafers, to Introduce the Requirements of ROHS Directive | |
| SNARF | | | | | Doc 4620 - Revision of SEMI M1-1107, Specifications for Polished Monocrystalline Silicon Wafers | |
| SNARF | | | | | Doc 4621 - Revision of SEMI M59-1105, Terminology for Silicon Technology and SEMI M7x, Test Methods for Extracting Relevant Characteristics from Measured Wafer Edge Profiles | |
| SNARF | | | | | Doc 4622 - Revision of SEMI MF1811-0704 - Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data | |
| SNARF | | | | | Doc 4624 - New Standard: Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers | |
| Traceability Committee |
| |
| SNARF | | | | | Doc 4617 - New Standard: Adding Subdocument onto T17 for Traceability Information of Die/Device on a Tray/Packaging Substrate | |
| SNARF | | | | | Doc 4643 - Reapproval of T1, Specification for Back Surface Bar Code Marking of Silicon Wafers | |
| SNARF | | | | | Doc 4644 - Reapproval of T11-0703, Specification for Marking of Hard Surface Reticle Substrates | |
| SNARF | | | | | Doc 4645 - Revision to T20-1108, Specification for System Architecture for Authentication of Semiconductors and Related Products | |