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Document 3784A: New Standard: Specification for 100 mm Round Polished Monocrystalline 4H and 6H Silicon Carbide Wafers <a href=/web/wstandards.nsf/44BB491FB9AA63C7882574E80061EBF2/$file/3784A.pdf>Download PDF 83.8K</a>,<a href=/web/wstandards.nsf/44BB491FB9AA63C7882574E80061EBF2/$file/3784A.pdf>Download PDF 155.0K</a>