Global Committee Meeting Minutes

SEMI International Standards
Technical Committee Meeting Minutes


Committee Information

Global Committee: Facilities, Gases
Region Meeting Was Held: Japan
Regional Meeting Name: Facilities & Gases


Meeting Information
Meeting Date: 12/15/2015Meeting End Date:
Meeting Event: SEMICON JapanMeeting Location: Tokyo Big Sight - Tokyo_Japan


Minutes Information
Author: Naoko Tejima
Minutes Written In English?: Yes

English Minutes:Minutes_151215_Gases_Facilities_R1.0.pdfMinutes_151215_Gases_Facilities_R1.0.pdf
Attachments:Attachment.zipAttachment.zip