Global Committee Meeting Minutes

SEMI International Standards
Technical Committee Meeting Minutes


Committee Information

Global Committee: Facilities, Gases
Region Meeting Was Held: Japan
Regional Meeting Name: Gases & Facilities


Meeting Information
Meeting Date: 05/19/2023Meeting End Date:
Meeting Event: Japan Spring MeetingsMeeting Location: SEMI Japan Office - Tokyo_Japan


Minutes Information
Author: Hirofumi Kanno
Minutes Written In English?: Yes

English Minutes:20230519_Minutes_Gases and Facilities_Approved.pdf20230519_Minutes_Gases and Facilities_Approved.pdf
Attachments:Attachment.zipAttachment.zip