Global Committee Meeting Minutes

SEMI International Standards
Technical Committee Meeting Minutes


Committee Information

Global Committee: Facilities, Gases
Region Meeting Was Held: Japan
Regional Meeting Name: Facilities, Gases


Meeting Information
Meeting Date: 04/12/2019Meeting End Date:
Meeting Event: Japan Spring MeetingsMeeting Location: SEMI Japan Office - Tokyo_Japan


Minutes Information
Author: Mizue Iwamura
Minutes Written In English?: Yes

English Minutes:20190412_Miniutes_Draft_Gases and Facilities_r2_Signed.pdf20190412_Miniutes_Draft_Gases and Facilities_r2_Signed.pdf
Attachments:20190412_G&F_Minutes_Attachment.zip20190412_G&F_Minutes_Attachment.zip