Global Committee Meeting Minutes

SEMI International Standards
Technical Committee Meeting Minutes

Committee Information

Global Committee: Micropatterning

Region Meeting Was Held: North America

Regional Meeting Name: Microlithography

Meeting Information

Meeting Date: 02/24/2016	Meeting End Date:
Meeting Event: NA Spring SPIE Microlithography Meetings	Meeting Location: Marriott Downtown - San Jose_CA

Minutes Information

Author: Kevin Nguyen
Minutes Written In English?: Yes

English Minutes: NA Microlithography Minutes Feb 2016 SPIE.pdf

Attachments: NAMicroFeb2016.zip