Global Committee Meeting Minutes

SEMI International Standards
Technical Committee Meeting Minutes


Committee Information

Global Committee: Facilities, Gases
Region Meeting Was Held: Japan
Regional Meeting Name: Gases & Facilities


Meeting Information
Meeting Date: 12/11/2020Meeting End Date:
Meeting Event: Meeting Location: SEMI Japan Office - Tokyo_Japan


Minutes Information
Author: Mami Nakajo
Minutes Written In English?: Yes

English Minutes:20201211_Minutes_Gases and Facilities_approved_r1.pdf20201211_Minutes_Gases and Facilities_approved_r1.pdf
Attachments:201211_Gases & Facilities Minutes Attachment.zip201211_Gases & Facilities Minutes Attachment.zip