Global Committee Meeting Minutes

SEMI International Standards
Technical Committee Meeting Minutes

Committee Information

Global Committee: Gases
Region Meeting Was Held: Japan
Regional Meeting Name: Facilities & Gases

Meeting Information
Meeting Date: 06/23/2017Meeting End Date:
Meeting Event: Japan Summer MeetingsMeeting Location: SEMI Japan Office - Tokyo_Japan

Minutes Information
Author: Mizue Iwamura
Minutes Written In English?: Yes

English Minutes:20170623_Miniutes_Draft_Gases and Facilities_r5.pdf20170623_Miniutes_Draft_Gases and Facilities_r5.pdf