Global Committee Meeting Minutes

SEMI International Standards
Technical Committee Meeting Minutes

Committee Information

Global Committee: Facilities, Gases
Region Meeting Was Held: Japan
Regional Meeting Name: Gases & Facilities

Meeting Information
Meeting Date: 09/15/2022Meeting End Date: 09/15/2022
Meeting Event: Japan Autumn MeetingsMeeting Location: SEMI Japan Office - Tokyo_Japan

Minutes Information
Author: Hirofumi Kanno
Minutes Written In English?: Yes

English Minutes:20220915_Gases and Facilities Japan Joint TC Chapter Mins v1.0.pdf20220915_Gases and Facilities Japan Joint TC Chapter Mins v1.0.pdf
Attachments:PDF Attachment.zipPDF