Global Committee Meeting Minutes

SEMI International Standards
Technical Committee Meeting Minutes


Committee Information

Global Committee: Facilities, Gases
Region Meeting Was Held: Japan
Regional Meeting Name: Gases and Facilities


Meeting Information
Meeting Date: 05/13/2022Meeting End Date:
Meeting Event: Meeting Location: OVTCCM


Minutes Information
Author: Keigo Nakajima
Minutes Written In English?: Yes

English Minutes:20220513_Minutes_Gases and Facilities_approved.pdf20220513_Minutes_Gases and Facilities_approved.pdf
Attachments:Atachments.zipAtachments.zip