Global Committee Meeting Minutes

SEMI International Standards
Technical Committee Meeting Minutes


Committee Information

Global Committee: Facilities, Gases
Region Meeting Was Held: Japan
Regional Meeting Name: Gases & Facilities


Meeting Information
Meeting Date: 05/14/2021Meeting End Date:
Meeting Event: Japan Spring MeetingsMeeting Location: WEB


Minutes Information
Author: Mami Nakajo
Minutes Written In English?: Yes

English Minutes:20210514_Minutes_Gases and Facilities_approved.pdf20210514_Minutes_Gases and Facilities_approved.pdf
Attachments:210514_Gases & Facilities Minutes Attachment.zip210514_Gases & Facilities Minutes Attachment.zip