Global Committee Meeting Minutes

SEMI International Standards
Technical Committee Meeting Minutes


Committee Information

Global Committee: Facilities, Gases
Region Meeting Was Held: Japan
Regional Meeting Name: Facilities & Gases


Meeting Information
Meeting Date: 03/18/2016Meeting End Date:
Meeting Event: Japan Spring MeetingsMeeting Location: SEMI Japan Office - Tokyo_Japan


Minutes Information
Author: Naoko Tejima
Minutes Written In English?: Yes

English Minutes:Miniutes_160318_Gases_Facilities_160318.pdfMiniutes_160318_Gases_Facilities_160318.pdf
Attachments:Attachment.zipAttachment.zip