Global Committee Meeting Minutes

SEMI International Standards
Technical Committee Meeting Minutes


Committee Information

Global Committee: Gases & Facilities
Region Meeting Was Held: Japan
Regional Meeting Name: Facilities


Meeting Information
Meeting Date: 09/27/2013Meeting End Date:
Meeting Event: Japan Autumn MeetingsMeeting Location: SEMI Japan Office - Tokyo_Japan


Minutes Information
Author: Naoko Tejima
Minutes Written In English?: Yes

English Minutes:Minutes_130927_G+F_R1.0.pdfMinutes_130927_G+F_R1.0.pdf
Attachments:Attachment.zipAttachment.zip