SEMI International Standards
Committee Meeting Minutes
Below you will find the committee minutes for all the regional committees within the SEMI Standards Program. These minutes are the official records for all committee and document activity.
Note that the list below is by the Global Technical Committee, with the most recent committee meeting listed first.
Click here to view Committee Meeting Minutes prior to December 31, 2012
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| 3DS-IC |
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| Automated Test Equipment |
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| Compound Semiconductor Materials |
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| Facilities |
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| FPD - Materials & Components |
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| FPD - Metrology |
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| Gases & Facilities |
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| Information & Control |
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| Apr 21, 2017 | | | | | | Japan Liquid Chemicals | | | | | | Available in English | | |
| Apr 4, 2017 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Dec 14, 2016 | | | | | | Japan Liquid Chemicals | | | | | | Available in English | | |
| Nov 8, 2016 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Jul 12, 2016 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Apr 5, 2016 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Dec 16, 2015 | | | | | | Japan Liquid Chemicals | | | | | | Available in English | | |
| Nov 3, 2015 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Oct 7, 2015 | | | | | | Europe Gases & Liquid Chemicals | | | | | | Available in English | | |
| Jul 14, 2015 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Mar 31, 2015 | | | | | | North America Liquid Chemicals | | | | | | Available in English | Minutes have not been reviewed | |
| Dec 3, 2014 | | | | | | Japan Liquid Chemicals | | | | | | Available in English | | |
| Nov 4, 2014 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Oct 7, 2014 | | | | | | Europe Gases & Liquid Chemicals | | | | | | Available in English | | |
| Jul 8, 2014 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Jun 3, 2014 | | | | | | Japan Liquid Chemicals | | | | | | Available in English | | |
| Apr 11, 2014 | | | | | | Japan Liquid Chemicals | | | | | | Available in English | | |
| Apr 1, 2014 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Dec 3, 2013 | | | | | | Japan Liquid Chemicals | | | | | | Available in English | | |
| Nov 5, 2013 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Oct 11, 2013 | | | | | | Japan Liquid Chemicals | | | | | | Available in English | | |
| Oct 8, 2013 | | | | | | Europe Gases & Liquid Chemicals | | | | | | Available in English | | |
| Jul 22, 2013 | | | | | | Japan Liquid Chemicals | | | | | | Available in English | | |
| Jul 9, 2013 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Apr 5, 2013 | | | | | | Japan Liquid Chemicals | | | | | | Available in English | | |
| Apr 2, 2013 | | | | | | North America Liquid Chemicals | | | | | | Available in English | | |
| Dec 4, 2012 | | | | | | Japan Liquid Chemicals | | | | | | Available in English | | |
| Oct 10, 2012 | | | | | | Europe Gases & Liquid Chemicals | | | | | | Available in English | | |
| MEMS / NEMS |
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| Micropatterning |
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| Photovoltaic - Automation |
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| Physical Interfaces & Carriers |
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| Traceability |
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