SEMI International Standards
Committee Meeting Minutes
Below you will find the committee minutes for all the regional committees within the SEMI Standards Program. These minutes are the official records for all committee and document activity.
Note that the list below is by the Global Technical Committee, with the most recent committee meeting listed first.
Click here to view Committee Meeting Minutes prior to December 31, 2012
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| 3DS-IC |
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| Compound Semiconductor Materials |
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| Facilities |
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| FPD - Materials & Components |
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| FPD - Metrology |
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| Gases & Facilities |
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| Information & Control |
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| MEMS / NEMS |
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| Oct 8, 2014 | | | | | | Europe Equipment Automation | | | | | | Available in English | | |
| Jul 9, 2014 | | | | | | North America Metrics | | | | | | Available in English | | |
| Apr 2, 2014 | | | | | | North America Metrics | | | | | | Available in English | Minutes have not been reviewed | |
| Oct 30, 2013 | | | | | | North America Metrics | | | | | | Available in English | Minutes have not been reviewed | |
| Oct 9, 2013 | | | | | | Europe Equipment Automation | | | | | | Available in English | | |
| Jul 10, 2013 | | | | | | North America Metrics | | | | | | Available in English | | |
| Apr 3, 2013 | | | | | | North America Metrics | | | | | | Available in English | | |
| Oct 31, 2012 | | | | | | North America Metrics | | | | | | Available in English | | |
| Micropatterning |
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| Photovoltaic - Automation |
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| Physical Interfaces & Carriers |
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| Traceability |
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