SEMI International Standards
Committee Meeting Minutes
Below you will find the committee minutes for all the regional committees within the SEMI Standards Program. These minutes are the official records for all committee and document activity.
Note that the list below is by the Global Technical Committee, with the most recent committee meeting listed first.
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| 3DS-IC |
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| Automated Test Equipment |
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| Compound Semiconductor Materials |
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| EHS |
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| FPD - Color Filter & Optical Elements |
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| FPD - Mask |
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| FPD - Materials & Components |
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| FPD - Metrology |
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| Gases & Facilities |
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| Information & Control |
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| MEMS |
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| Apr 1, 2013 | | | | | | NA MEMS / NEMS | | | | | | Available in English | | |
| Oct 29, 2012 | | | | | | NA MEMS / NEMS | | | | | | Available in English | | |
| Jul 9, 2012 | | | | | | NA MEMS / NEMS | | | | | | Available in English | | |
| Apr 2, 2012 | | | | | | NA MEMS / NEMS | | | | | | Available in English | | |
| Oct 24, 2011 | | | | | | NA MEMS / NEMS | | | | | | Available in English | | |
| Jul 11, 2011 | | | | | | NA MEMS / NEMS | | | | | | Available in English | | |
| Mar 28, 2011 | | | | | | NA MEMS / NEMS | | | | | | Available in English | | |
| Nov 8, 2010 | | | | | | NA MEMS / NEMS | | | | | | Available in English | | |
| Jul 12, 2010 | | | | | | NA MEMS / NEMS | | | | | | Available in English | | |
| Mar 29, 2010 | | | | | | NA MEMS / NEMS | | | | | | Available in English | Minutes have not been reviewed | |
| Metrics |
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| Photovoltaic |
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| Photovoltaic - Automation |
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| Photovoltaic - Materials |
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| Physical Interfaces & Carriers |
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| Silicon Wafer |
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