SEMI International Standards
Standards Locale: North America
Committee: MEMS / NEMS
Place of Meeting: SEMI Headquarters
Date of Meeting: 11/06/2017
Meeting End Date: 11/06/2017
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 11/16/2017


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5267New Standard, Specification for Microfluidic Port and Pitch DimensionsPassed, as balloted5267AProceduralReview.pdf5267AProceduralReview.pdf
NOTE 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

NOTE 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)

MEMS & Sensors Technical Congress (February 13-14, 2018)

Next Meeting

The next meeting of the MEMS/NEMS North America TC Chapter is scheduled for Monday, April 9, at the SEMI Standards North America Spring 2018 Meetings located at SEMI Headquarters in Milpitas, California.
For more information, please visit the Standards Calendar at http://www.semi.org/en/standards.

Tentative Schedule:

        Monday, April 9
            13:30-16:00 MEMS / NEMS (C) and Joint SEMI MSIG, MEMS Characterization, MEMS Substrate (TF)s