SEMI International Standards
Standards Locale: North America |
Committee: Liquid Chemicals |
Place of Meeting: SEMI HQ, San Jose, CA |
Date of Meeting: 04/05/2016 |
Meeting End Date: 04/05/2016 |
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Recording SEMI Standards Staff: James Amano |
CER Posted to Web: |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5944 | Revision to SEMI F63-0213, Guide for Ultrapure Water Used in Semiconductor Processing | Passed | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None
Authorized Ballots
# | When | SC/TF/WG | Details |
5642A | Cycle 4 or 5, 2016 | Analytical Methods Task Force | Revision to SEMI C35-0708, Specifications and Guideline for Nitric Acid with title change to: Specification and Guide for Nitric Acid |
5992 | Cycle 4 or 5, 2016 | High Purity Liquid Assemblies & Systems | Revision to SEMI F41-0699, Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing |
5944A | Cycle 5-2016 | F63 Revision Task Force | Revision to SEMI F63-0213, Guide for Ultrapure Water Used in Semiconductor Processing (if failed by A&R SC) |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
In conjunction with NA Spring 2016 meetings.
http://www.semi.org/en/standards-events
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