SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: San Jose, CA
Date of Meeting: 11/03/2015
Meeting End Date: 11/03/2015
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 11/16/2015


Leadership Changes

Group
Previous Leader
New Leader
Gases CommitteeTim Volin – retired
Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5876New Standard - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used In Corrosive Gas Systems by Use of a Ferric Chloride SolutionPassed with editorial changes5876ProceduralReview.docx5876ProceduralReview.docx
5816ALine item Revision to SEMI F30-0710 - Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site with title change to Test Method for the Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation SiteFailed Procedural Review 5816AProceduralReview.docx5816AProceduralReview.docx
R5080BRevision of SEMI F51 0200 Guide for Elastometric Sealing Technology
[Follow up with the result of the ratification ballot]		No Action, will be review in Spring 2016
R5671CRevision to SEMI C3.12 1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality
[Follow up with the result of the ratification ballot]		Passed with editorial change via a PIP form
R5673CRevision of SEMI C3.34 1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality
[Follow up with the result of the ratification ballot]		Passed with editorial change via a PIP form


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
5964SNARFMass Flow Controller Task ForceLine item revision to SEMI E56-0314, Test Method For Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, And Dead Band Of Thermal Mass Flow Controllers to go out for cycle 9
5963SNARFMass Flow Controller Task ForceLine Item Revision To SEMI F62-0701 (Reapproved 1111) Test Method For Determining Mass Flow Controller Performance Characteristics From Ambient And Gas Temperature Effects to go out for cycle 2
3440BSNARFPressure Measurement Task ForceNew Standard: Test Method for Pressure Measurement Devices
to go out for cycle 2


Authorized Ballots

#
When
SC/TF/WG
Details
5964Cycle 9 – 2015Mass Flow Controller Task ForceLine item revision to SEMI E56-0314, Test Method For Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, And Dead Band Of Thermal Mass Flow Controllers
5963Cycle 2 - 2016Mass Flow Controller Task ForceLine Item Revision to SEMI F62-0701 (Reapproved 1111) Test Method For Determining Mass Flow Controller Performance Characteristics From Ambient And Gas Temperature Effects
3440BCycle 2 - 2016Pressure Measurement Task ForceNew Standard: Test Method for Pressure Measurement Devices


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
Doc 5570, Reapproval of SEMI E51-0200, Guide for Typical Facilities Services and Termination Matrix was granted 1 year extension
Doc 5572, Reapproval of SEMI E6-0303, Guide for Semiconductor Equipment Installation Documentation was granted 1 year extension


Next Meeting
NA Spring Meeting 2016
For more information, please visit: http://www.semi.org/standards