SEMI International Standards
| Standards Locale: North America |
| Committee: Information & Control |
| Place of Meeting: SEMI Headquarters in San Jose, California |
| Date of Meeting: 04/01/2015 |
| Meeting End Date: 04/01/2015 |
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| Recording SEMI Standards Staff: Paul Trio |
| CER Posted to Web: 04/08/2015 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| Cycle 1, 2015 Ballots | | |
5274D | Revision to Add a New Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard | Failed, to be reballoted |  5274D Ballot Review FAILED.docx |
| Cycle 2, 2015 Ballots | | |
5618A | New Standard: Specification for Preservation of Recipe Integrity (PRI) | Failed, to be reballoted |  5618A Ballot Review FAILED.docx |
5677 | Line Item Revisions to SEMI E164-0414, Specification for EDA Common Metadata | |  5677ProceduralReview.docx |
Line Item 1 | E164 Complementary Files & Various Materials Corrections | Passed as balloted | |
5762 | Line Item Revisions to SEMI E132.1, Specification for Soap Binding for Equipment Client Authentication and Authorization (ECA) | |  5762ProceduralReview.docx |
Line Item 1 | E132.1 Session Group Name | Passed as balloted | |
5821 | New Standard: Specification for Subsystem Energy Savings Mode Communication (SESMC) | Failed, to be reballoted |  5821 Ballot Review FAILED.docx |
5824 | Line Item Revisions to SEMI E172-0115, Specification for SECS Equipment Data Dictionary (SEDD) | |  5824ProceduralReview.docx |
Line Item 1 | Editorial Updates and Minor Corrections | Passed as balloted | |
Line Item 2 | SEDD Schema Restriction Resolution | Passed as balloted | |
Line Item 3 | Terminology Adjustment | Passed as balloted | |
Line Item 4 | Source Field Length Adjustment | Passed as balloted | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the committee.
# | Type | SC/TF/WG | Details |
TBA | SNARF | Sensor Bus TF | Line Item Revision to SEMI E54 Primary Standard and Subordinate Standards to correct nonconforming titles |
TBA | SNARF | GEM300 TF | Line Item Revision to SEMI E172, Specification for SECS Equipment Data Dictionary (SEDD) |
TBA = to be assigned
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents approved by the committee for letter ballot.
# | When | SC/TF/WG | Details |
| 5274E | Cycle 5, 2015 | Sensor Bus TF | Revision to Add a New Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard |
| TBA | Cycle 5, 2015 | Sensor Bus TF | Line Item Revision to SEMI E54 Primary Standard and Subordinate Standards to correct nonconforming titles |
| 5821A | Cycle 5, 2015 | Energy Saving Equipment Communication (ESEC) TF | New Standard: Specification for Subsystem Energy Savings Mode Communication (SESMC) |
| 5618B | Cycle 5, 2015 | GEM300 TF | New Standard: Specification for Preservation of Recipe Integrity (PRI) |
TBA = to be assigned
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
GEM300 TF SNARFs # 5454 and 5508 Discontinued
At the North America I&C Committee meeting held April 1, in conjunction with the NA Standards Spring 2015 Meetings, the following activities under the GEM300 Task Force were discontinued:
- Revisions to SEMI E30, Specification for Generic Equipment Model (GEM) Standard and SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II) [SNARF # 5454]
- Revisions to: SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II); SEMI E90, Specification for Substrate Tracking; SEMI E90.1, Specification for SECS-II Protocol Substrate Tracking [SNARF # 5508]
Sensor Bus TF SNARF # 5274 Continuing
The NA I&C committee found the Sensor Bus TF activity, Revision to Add a New Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard (SNARF # 5274), to be continuing in accordance with section 8.3.2 of the SEMI Standards Regulations.
Next Meeting
SEMICON West 2015 Meetings
July 13-16, 2015
San Francisco Marriott Marquis Hotel
780 Mission Street
San Francisco, California 94103
U.S.A.
Monday, July 13
- I&C Leadership (1:00 PM to 2:00 PM)
- Diagnostic Data Acquisition (DDA) TF (2:00 PM to 4:00 PM)
Tuesday, July 14
- Energy Saving Equipment Communication TF (8:00 AM to 12:00 Noon)
- GEM300 TF (1:00 PM to 5:00 PM)
- Sensor Bus TF (1:00 PM to 3:00 PM)
- Process Control System (PCS) TF (3:00 PM to 5:00 PM)
- I&C GCS (5:00 PM to 6:00 PM)
Wednesday, July 15
- I&C Committee (8:00 AM to 4:30 PM)
For more information, please visit: http://www.semi.org/standards
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