SEMI International Standards
Standards Locale: North America |
Committee: Micropatterning |
Place of Meeting: San Francisco Marriott Marquis, San Francisco, California |
Date of Meeting: 07/11/2017 |
Meeting End Date: 07/11/2017 |
|
Recording SEMI Standards Staff: Kevin Nguyen |
CER Posted to Web: 07/24/2017 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
Microlithography TC Chapter | Wes Erck is retired | |
Committee Structure Changes
Previous WG/TF/SC Name | New WG/TF/SC Name or Status Change |
| Patterning Metrology Task Force (new TF) |
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
tbd | SNARF | Patterning Metrology Task Force | Revision to SEMI P18-92 (Reapproved 1104)
SPECIFICATION FOR OVERLAY CAPABILITIES OF WAFER STEPPERS (pending two weeks members review) |
tbd | SNARF | Patterning Metrology Task Force | Line Item revision to SEMI P19-92 (Reapproved 0707)
SPECIFICATION FOR METROLOGY PATTERN CELLS FOR INTEGRATED CIRCUIT MANUFACTURE |
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
July 10, 2018 (tentative) in conjunction with SEMICON West 2018 in San Francisco, CA. Check www.semi.org/standards under calendar for latest update.
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