SEMI International Standards
| Standards Locale: North America |
| Committee: Facilities & Gases |
| Place of Meeting: San Francisco Marriott Marquis |
| Date of Meeting: 07/12/2016 |
| Meeting End Date: 07/12/2016 |
 |
| Recording SEMI Standards Staff: Laura Nguyen |
| CER Posted to Web: 07/28/2016 |
Leadership Changes
Group | Previous Leader | New Leader |
| Gases Specifications Task Force | Open | Thomas Fritz (WIKA)
Matt Milburn (UCT) |
| Power Grid Harmonics Task Force | New Task Force in the Facilities TC Chapter | Alex McEachern (Power Standards Lab) |
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 3440C | New Standard: Test Method for Pressure Transducers in Gas Delivery Systems | Passed, Ratification Ballot to be issued |  3440CProceduralReview.docx |
| 5997 | Line Item Revision to SEMI C3-0413, Specifications for Gases | | |
| Line Item 1 | Correct the title of this Standard from “Specifications for Gases” to “Specification for Gases” | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
| 5998 | Line Item Revision to SEMI C54-1103 (Reapproved 0211), Specifications and Guidelines for Oxygen | |  5998ProceduralReview.pdf |
| Line Item 1 | Correct the title of this Standard from “Specifications and Guidelines for Oxygen” to “Specification for Oxygen” | Passed, Super clean | |
| 5999 | Line Item Revision to SEMI C56-0305 (Reapproved 0211), Specifications and Guidelines for Dichlorosilane (SiH2Cl2) | |  5999ProceduralReview.pdf |
| Line Item 1 | Correct the title of this Standard from “Specifications and Guidelines for Dichlorosilane (SiH2Cl2)” to “Specification for Dichlorosilane” | Passed, Super clean | |
| 6000 | Line Item Revision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon | | |
| Line Item 1 | Correct the title of this Standard from “Specifications and Guidelines for Argon” to “Specification and Guide for Argon” | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
| 6001 | Line Item Revision to SEMI C58-1213, Specifications for Hydrogen | |  6001ProceduralReview.pdf |
| Line Item 1 | Correct the title of this Standard from “Specifications for Hydrogen” to “Specification for Hydrogen” | Passed, Super clean | |
| 6002 | Line Item Revision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen | | |
| Line Item 1 | Correct the title of this Standard from “Specifications and Guidelines for Nitrogen” to “Specification and Guide for Nitrogen” | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
| 6003 | Line Item Revision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O) | | |
| Line Item 1 | Correct the title of this Standard from “Specifications and Guidelines for Nitrous Oxide (N2O)” to “Specification and Guide for Nitrous Oxide” | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
| 6004 | Line Item Revision to SEMI C70-0611, Specifications for Tungsten Hexafluoride (WF6) | |  6004ProceduralReview.pdf |
| Line Item 1 | Correct the title of this Standard from “Specifications for Tungsten Hexafluoride (WF6)” to “Specification for Tungsten Hexafluoride” | Passed, Super clean | |
| 5244B | Revision of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean Environments | Passed, as balloted |  5244BProceduralReview.pdf |
| 5963A | Line Item Revision To Semi F62-0701 (Reapproved 1111) Test Method For Determining Mass Flow Controller Performance Characterisitics From Ambient And Gas Temperature Effects | |  5963AProceduralReview.pdf |
| Line Item 1 | Modify terminology in Section 5.1 | Passed, with editorial changes | |
| Line Item 2 | Modify Section 15.1 as shown | Passed, Super clean | |
| 5964A | Line Item Revision To Semi E56-0815 Test Method For Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, And Dead Band Of Thermal Mass Flow Controllers | | |
| Line Item 1 | Modify terminology in Section 5.1 | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
| Line Item 2 | Change to Formula 1 | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
| Line Item 3 | Change to Formula 2 | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
| Line Item 4 | Change to Formula 5 | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
| Line Item 5 | Change to Formula 6 | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
| Line Item 6 | Change to Formula 8 | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
| Line Item 7 | Change to Formula 16 | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
| 5155 | New Standard, Guide for Facilities Data Package for Semiconductor Equipment Installation | Failed, returned to the TF for re-work and re-ballot in Cycle 7 | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| R3440C | Rat. Ballot | Pressure Measurement TF | New Standard: Test Method for Pressure Transducers in Gas Delivery Systems - 3440C passed committee review with a Ratification Ballot to be issued for Cycle 6-16 |
| 5816B | SNARF | Filters & Purifiers TF | Revision to SEMI F30-0710: Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site – SNARF was revised, completed two-week member review, and was approved to ballot for Cycle 6-16 |
| 6059 | SNARF | Filters & Purifiers TF | SEMI F29-0997 (Reapproved 0611): Test Method for Purge Efficacy of Gas Source System Panels – Due for Five-Year Review |
| 6060 | SNARF | Filters & Purifiers TF | SEMI F70-0611: Test Method for Determination of Particle Contribution of Gas Delivery System – Due for Five-Year Review |
| 6050 | SNARF | Mass Flow Controller TF | SEMI E16-0611: Guideline for Determining and Describing Mass Flow Controller Leak Rates – Due for Five-Year Review, Line item revision to correct the nonconforming title |
| 6054 | SNARF | Mass Flow Controller TF | SEMI E18-0211: Guide for Temperature Specifications of the Mass Flow Controller – Due for Five-Year Review |
| 6055 | SNARF | Mass Flow Controller TF | SEMI E27-0611: Standard for Mass Flow Controller and Mass Flow Meter Linearity – Due for Five-Year Review, Line item revision to correct the nonconforming title |
| 6056 | SNARF | Mass Flow Controller TF | SEMI E28-1110: Guide for Pressure Specifications of the Mass Flow Controller – Due for Five-Year Review |
| 6057 | SNARF | Mass Flow Controller TF | SEMI E29-1110: Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters – Due for Five-Year Review |
| 6058 | SNARF | Mass Flow Controller TF | SEMI E66-0611: Test Method for Determining Particle Contribution by Mass Flow Controllers – Due for Five-Year Review |
| 5997A | SNARF | Gases Specifications TF | Line Item Revision to SEMI C3-0413, Specifications for Gases – SNARF to be revised, distributed for two-week TC member review followed by GCS and re-ballot for Cycle 7-16. |
| 6000A | SNARF | Gases Specifications TF | Line Item Revision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon – SNARF to be revised, distributed for two-week TC member review followed by GCS and re-ballot for Cycle 7-16. |
| 6002A | SNARF | Gases Specifications TF | Line Item Revision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen – SNARF to be revised, distributed for two-week TC member review followed by GCS and re-ballot for Cycle 7-16. |
| 6003A | SNARF | Gases Specifications TF | Line Item Revision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O) – SNARF to be revised, distributed for two-week TC member review followed by GCS and re-ballot for Cycle 7-16. |
| TFOF | Power Grid Harmonics TF | Approval of new Task Force on 07/12/2016 |
| 6037 | SNARF | Power Grid Harmonics TF | New Standard: Specification for Power Grid Harmonics Compatibility |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
| R3440C | Cycle 6, 2016 | Pressure Measurement TF | Ratification Ballot for New Standard: Test Method for Pressure Transducers in Gas Delivery Systems |
| 5816B | Cycle 6, 2016 | Filters & Purifiers TF | Revision to SEMI F30-0710: Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site |
| 6060 | Cycle 6, 2016 | Filters & Purifiers TF | Reapproval of SEMI F70-0611 – Test Method for Determination of Particle Contribution of Gas Delivery System |
| 6059 | Cycle 6, 2016 | Filters & Purifiers TF | Reapproval of SEMI F29-0997 (Reapproved 0611) – Test Method for Purge Efficacy of Gas Source System Panels |
| 6050 | Cycle 6, 2016 | Mass Flow Controller TF | Line Item Revision to Correct the Title of SEMI E16-0611: Guideline for Determining and Describing Mass Flow Controller Leak Rates |
| 6054 | Cycle 6, 2016 | Mass Flow Controller TF | Reapproval of SEMI E18-0211: Guide for Temperature Specifications of the Mass Flow Controller |
| 6055 | Cycle 6, 2016 | Mass Flow Controller TF | Reapproval of SEMI E27-0611: Guide for Mass Flow Controller and Mass Flow Meter Linearity |
| 6056 | Cycle 6, 2016 | Mass Flow Controller TF | Reapproval of SEMI E28-1110: Guide for Pressure Specifications of the Mass Flow Controller |
| 6057 | Cycle 6, 2016 | Mass Flow Controller TF | Reapproval of SEMI E29-1110: Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters |
| 6058 | Cycle 6, 2016 | Mass Flow Controller TF | Reapproval of SEMI E66-0611: Test Method for Determining Particle Contribution by Mass Flow Controllers |
| 5964B | Cycle 6 or 7, 2016 | Mass Flow Controller TF | Line Item Revision To Semi E56-0815 Test Method For Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, And Dead Band Of Thermal Mass Flow Controllers |
| 5997A | Cycle 7, 2016 | Gases Specifications TF | Line Item Revision to SEMI C3-0413, Specifications for Gases – SNARF to be revised, sent out for two-week member review followed by GCS and re-ballot for Cycle 7-16. |
| 6000A | Cycle 7, 2016 | Gases Specifications TF | Line Item Revision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon – SNARF to be revised, sent out for two-week member review followed by GCS and re-ballot for Cycle 7-16. |
| 6002A | Cycle 7, 2016 | Gases Specifications TF | Line Item Revision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen – SNARF to be revised, sent out for two-week member review followed by GCS and re-ballot for Cycle 7-16. |
| 6003A | Cycle 7, 2016 | Gases Specifications TF | Line Item Revision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O) – SNARF to be revised, sent out for two-week member review followed by GCS and re-ballot for Cycle 7-16. |
| 5155A | Cycle 7, 2016 | BIM TF | New Standard, Guide for Facilities Data Package for Semiconductor Equipment Installation |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting of the Joint Facilities & Gases NA TC Chapter committee is scheduled for Tuesday, November 8, 2016 at the NA Standards Fall 2016 Meetings at SEMI Headquarters.
For more information, please visit: http://www.semi.org/en/standards
Copyright ©2024 Semiconductor Equipment and Materials International (SEMI®). All rights reserved.
|