SEMI International Standards
| Standards Locale: North America |
| Committee: Facilities & Gases |
| Place of Meeting: SEMI HQ, San Jose, California |
| Date of Meeting: 10/29/2013 |
| Meeting End Date: 10/29/2013 |
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| Recording SEMI Standards Staff: Kevin Nguyen |
| CER Posted to Web: 11/04/2013 |
Leadership Changes
Group | Previous Leader | New Leader |
| Materials of Construction of Gas Delivery Systems Task Force | | Bill Kiikvee (AP Tech) |
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5577A | Revision of SEMI F105-0708, Guide for Metallic Material Compatibility in Gas Distribution Systems | Passed as superclean |  |
5444 | Revision of SEMI F72-0309, Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components | Passed as balloted |  |
5611 | Revision of SEMI C3.20-0309, Specification for Helium (He), in Cylinders, 99.9995% Quality | Passed as balloted |  |
5609 | Revision of SEMI C3.24.0309, Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality | Passed as superclean |  |
5571A | Revision of SEMI E56-0309, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Dead Band of Thermal Mass Flow Controllers | Passed as superclean |  |
5610 | New Auxiliary Information: Codes for Referencing Gases, Gas Mixtures and Vaporizable Materials Used In Digital Mass Flow Controllers | Approved |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
5668 | SNARF | MFC TF | Withdrawal of SEMI E52, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers |
5669 | SNARF | MFC TF | Line Item Revisions of:
SEMI E6-0303
Guide for Semiconductor Equipment Installation Documentation
SEMI E54.18-1106 (Reapproved 1211)
Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
SEMI E54.22-0613
Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
SEMI F79-0710
Guide for Gas Compatibility with Silicon Used in Gas Distribution Components
SEMI F105-0708
Guide for Metallic Material Compatibility in Gas Distribution Systems |
5670 | SNARF | MFC TF | Reapproval for SEMI E12, Standard for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers |
5671 | SNARF | Gases Specifications TF | Reapproval of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality |
5672 | SNARF | Gases Specifications TF | Reapproval of SEMI C3.32-1109, Specification for Chlorine (Cl2), 99.996% Quality |
5673 | SNARF | Gases Specifications TF Gases Specifications TF | Reapproval of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality |
5674 | SNARF | Gases Specifications TF | Reapproval of SEMI C3.37-1109, Specification for Hexafluoroethane (C2F6), 99.97% Quality |
Authorized Ballots
# | When | SC/TF/WG | Details |
3440A | Cycle 1-2014 | Pressure Measurement TF | New Standard: Test Method For Pressure Transducers In Gas Delivery Systems |
5667 | Cycle 1-2014 | Filters and Purifiers TF | Revision to SEMI F112-0613,5667 Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS) |
5668 | Cycle 1-2014 | MFC TF | Withdrawal of SEMI E52, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers |
5669 | Cycle 1-2014 | MFC TF | Line Item Revisions of:
SEMI E6-0303
Guide for Semiconductor Equipment Installation Documentation
SEMI E54.18-1106 (Reapproved 1211)
Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
SEMI E54.22-0613
Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
SEMI F79-0710
Guide for Gas Compatibility with Silicon Used in Gas Distribution Components
SEMI F105-0708
Guide for Metallic Material Compatibility in Gas Distribution Systems |
5670 | Cycle 1-2014 | MFC TF | Reapproval for SEMI E12, Standard for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers |
5671 | Cycle 1-2014 | Gases Specifications TF | Reapproval of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality |
5672 | Cycle 1-2014 | Gases Specifications TF | Reapproval of SEMI C3.32-1109, Specification for Chlorine (Cl2), 99.996% Quality |
5673 | Cycle 1-2014 | Gases Specifications TF Gases Specifications TF | Reapproval of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality |
| 5674 | Cycle 1-2014 | Gases Specifications TF | Reapproval of SEMI C3.37-1109, Specification for Hexafluoroethane (C2F6), 99.97% Quality |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting will be in conjunction with NA Spring Standards Meetings in San Jose, California at SEMI HQ. The committee will meet on Tuesday, April 1, 2014. Check www.semi.org/standards on calendar of event for the latest schedule.
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