SEMI International Standards
| Standards Locale: North America |
| Committee: Liquid Chemicals |
| Place of Meeting: SEMI Headquarters, Milpitas, California/USA |
| Date of Meeting: 11/07/2023 |
| Meeting End Date: 11/07/2023 |
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| Recording SEMI Standards Staff: Laura Nguyen |
| CER Posted to Web: 12/07/2023 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| Liquid Chemicals North America Technical Committee | Koh Murai (Kinetics) [stepped down]
Don Hadder (Intel)
Steve Rogers (FUJIFILM Electronic Materials Process Chemicals)
Laura Ledenbach (Evonik) | David Kandiyeli (Kinetics) [New]
Don Hadder (Intel)
Steve Rogers (FUJIFILM Electronic Materials Process Chemicals)
Laura Ledenbach (Evonik) |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action#1,2 | A&R Forms for Approved Ballots |
| 6828D | Revision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems | Passed, with technical changes and with or without editorial changes; Ratification Ballot to be issued. |  6828D_ProceduralReview.pdf |
#1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
#2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
Document # | Document Title | ISC A&R Action#1,2 | A&R Forms |
| R6315C | Revision to SEMI C30-0218, Specification for Hydrogen Peroxide, with title change to: Specification and Guide for Hydrogen Peroxide | Passed |  R6315C_ProceduralReview.pdf |
| R6388B | Revision to SEMI C44-0618, Specification and Guide for Sulfuric Acid | Passed |  R6388B_ProceduralReview.pdf |
| R6917 | Revision to SEMI F39-0621, Guide for Chemical Blending Systems | Passed |  R6917_ProceduralReview.pdf |
#1: Passed Ratification ballots will be submitted to SEMI publication for final processing.
#2: Failed Ratification ballots were returned to the originating task forces for re-work and re-balloting or abandoning.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all revised or new SNARF(s) and TFOF(s) approved by the Originating TC Chapter.
# | Type#1 | SC/TF/WG | Details |
- | TFOF | TF | High Purity Polymer Materials and Components TFOF was revised to reflect change in charter and scope. |
#1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| 6601 | Cycle 1 or 2-2024 | High Purity Polymer Materials and Components TF | New Standard: Guide to Meet IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
New Standard: Guide for Reporting Performance Parameters of the Retaining Rings for Chemical Mechanical Planarization (CMP) used in Semiconductor Manufacturing |
| 6904A | Cycle 1 or 2-2024 | CMP-C TF | New Standard: Guide for Reporting Performance Parameters of the Retaining Rings for Chemical Mechanical Planarization (CMP) used in Semiconductor Manufacturing |
| 7006 | Cycle 1 or 2-2024 | High Purity Polymer Materials and Components TF | Revision to SEMI C69-1015 (Reapproved 1220), Test Method for the Determination of Surface Areas of Polymer Pellets |
| 7087 | Cycle 1 or 2-2024 | UPW TF | Revision to SEMI F63-0521, Guide for Ultrapure Water Used in Semiconductor Processing |
| 7091A | Cycle 1 or 2-2024 | High Purity Polymer Materials and Components TF | Revision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems, with title change to: Test Method and Specification for Testing of Perfluoroalkoxy (PFA) and Other Fluorinated Materials Used in Liquid Chemical Distribution Systems |
| 7141 | Cycle 1 or 2-2024 | Chemical Analytical Methods TF | Revision to SEMI C21-0618, Specification and Guide for Ammonium Hydroxide |
| 7142 | Cycle 1 or 2-2024 | Chemical Analytical Methods TF | Revision to SEMI C28-0618, Specification and Guide for Hydrofluoric Acid |
| 7143 | Cycle 1 or 2-2024 | Chemical Analytical Methods TF | Revision to SEMI C29-0618, Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) |
| 7144 | Cycle 1 or 2-2024 | Chemical Analytical Methods TF | Revision to SEMI C35-0118, Specification and Guide for Nitric Acid |
| 7145 | Cycle 1 or 2-2024 | Chemical Analytical Methods TF | Revision to SEMI C40-1110 (Reapproved 0618), Specification for Potassium Hydroxide, 45% Solution |
| 7146 | Cycle 1 or 2-2024 | Chemical Analytical Methods TF | Revision to SEMI C41-0618, Specification and Guide for 2-Propanol |
| 7147 | Cycle 1 or 2-2024 | Chemical Analytical Methods TF | Revision to SEMI C45-0518, Specification and Guide for Tetraethylorthosilicate (TEOS) |
| 7148 | Cycle 1 or 2-2024 | Chemical Analytical Methods TF | Revision to SEMI C62-0309 (Reapproved 0618), Specification for Porogen Precursors Used in Low K CVD Processes |
| 7149 | Cycle 1 or 2-2024 | Chemical Analytical Methods TF | Revision to SEMI C63-1108 (Reapproved 0618), Specification for Organosilicate Precursors Used in Low K CVD Processes |
| R6828D | Cycle 1 or 2-2024 | Chemical Analytical Methods TF | Revision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems |
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
| 6601 | High Purity Polymer Materials and Components TF | New Standard: Guide to Meet IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water | Fall 2024 |
| 6716 | UPW TF | Revision to SEMI C79-0819, Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems | Fall 2024 |
#1: If the Standards Document Development Project is found to be continuing, but cannot be completed within the current project period, the TC Chapter may grant a one-year extension at a time, as many times as necessary. [Regulations § 8.3]
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for the week of March 25-28, in conjunction with NA Standards Spring Meetings 2024. Schedule details TBD. Please check www.semi.org/standards for updates.
Tentative Schedule TBD:
Task Forces will continue to meet on their weekly/bi-weekly cadence. Subject to change.
· Monday, March 25
o Suggestion: PM webinar-type report out of TFs to the industry vs formal
· Tuesday, March 26
o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting (Day 1 – traditional reports and voting)
· Wednesday, March 27
o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting (Day 2 – voting and authorizations)
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