SEMI International Standards
Standards Locale: North America
Committee: MEMS / NEMS
Place of Meeting: SEMI Headquarters in San Jose, California
Date of Meeting: 03/30/2015
Meeting End Date: 03/30/2015
Recording SEMI Standards Staff: Michael Tran
CER Posted to Web: 04/08/2015


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document #
Document Title
TC Chapter Action
A&R Forms for Approved Ballots
5808Reapproval of SEMI MS8-0309, Guide to Evaluating Hermeticity of MEMS PackagesPassed TC Chapter review as balloted. Superclean5808ProceduralReview.doc5808ProceduralReview.doc
4719CRevision to SEMI MS3-0307, Terminology for MEMS TechnologyPassed TC Chapter review as balloted.
Superclean		4719CProceduralReview.doc4719CProceduralReview.doc


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the TC Chapter:
#
Type
SC/TF/WG
Details
5870SNARFNA MEMS / NEMS TC ChapterLine Item revision to SEMI MS4-1113, Standard Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance with title change to: Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF


Authorized Ballots
Listing of documents approved by the committee for letter ballot.
#
When
SC/TF/WG
Details
5870Cycle 4 or 5, 2015NA MEMS / NEMS TC ChapterLine Item revision to SEMI MS4-1113, Standard Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance with title change to: Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
SEMICON West 2015
July 14-16, 2015
Moscone Center, San Francisco
Register Today!

Next Meeting
The next N.A. MEMS / NEMS standards meetings are tentatively scheduled for July 13, 2015 at the San Francisco Marriott Marquis Hotel in San Francisco, CA in conjunction with the NA Standards Meetings at SEMICON West 2015. Exact meeting date and details will be announced when finalized and available at the SEMI Standards Calendar of Events: http://www.semi.org/en/Standards/CalendarEvents

Tentative Schedule:
Monday, July 13
· Microfluidics TF (10:00 AM - 11:00 AM)
· N.A. MEMS / NEMS Committee (2:30 PM - 4:30 PM)

*All times are in Pacific Time. Times and dates are subject to change without notice.