SEMI International Standards
Standards Locale: North America
Committee: Liquid Chemicals
Place of Meeting: San Francisco Marriott in San Francisco, California
Date of Meeting: 07/14/2015
Meeting End Date: 07/14/2015
Recording SEMI Standards Staff: David Bouldin
CER Posted to Web: 07/28/2015


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for rework and reballoting.
Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
Cycle 4, 2015 Ballots
5810A
New Standard: Test Method and Specification for Testing PFA Materials Used in Liquid Chemical Distribution SystemsPassed with editorial changes5810A_Procedural_ReviewRev3.docx5810A_Procedural_ReviewRev3.docx


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the TC Chapter.
#
Type
SC/TF/WG
Details
TFOFE49.2 / E49.7 Review/Rewrite TFThe TF will consist of designers, suppliers, and end users with the goal of reviewing and rewriting SEMI E49-2 and E49-7 to update content and to bring into current SEMI format requirements. E49-2 and E49-7 are orphaned Standards that were last reviewed/worked on in November, 2004.
TFOFE49.4 / E49.5 Evaluation Review/Rewrite TFThe TF will evaluate SEMI E49.4 and E49.5 to determine if there is a need to revise content (and bring them into current SEMI format requirements), consolidate them into one Standard, they are obsolete, and/or make them Inactive. E49-2 and E49-7 are orphaned Standards that were last reviewed/worked on in February, 1998 and November, 2004, respectively.


Authorized Ballots
Listing of documents approved by the TC Chapter for Letter Ballot.
#
When
SC/TF/WG
Details
5831ACycle 7, 2015Analytical Methods TFRevision to SEMI C27-0708, Specifications and Guideline for Hydrochloric Acid with title change to: Specification and Guide for Hydrochloric Acid


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
F63 Revision TF Activity
At the North America NA Liquid Chemicals TC Chapter meeting held July 14, in conjunction with the NA Standards SEMICON West 2015 Meetings, they approved the creation of a new SNARF to revise F63 Guide for Ultrapure Water Used in Semiconductor Processing. Since the SNARF had not been issued for TC Member review in accordance with § 8.2.1 of the SEMI Standards Regulations, it will be sent for TC Member review, a request to the GCS for final approval of the SNARF.

E49.2 / E49.7 Review/Rewrite TF Activity
At the North America NA Liquid Chemicals TC Chapter meeting held July 14, in conjunction with the NA Standards SEMICON West 2015 Meetings, they approved the creation of a new E49.2 / E49.7 Review/Rewrite TF and a new SNARF to revise E49.2-1104, Guide for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment with title change. Since the SNARF had not been issued for TC Member review in accordance with § 8.2.1 of the SEMI Standards Regulations, it will be sent for TC Member review, a request to the GCS for final approval of the SNARF.

E49.4 / E49.5 Evaluation Review/Rewrite TF Activity
At the North America NA Liquid Chemicals TC Chapter meeting held July 14, in conjunction with the NA Standards SEMICON West 2015 Meetings, they approved the creation of a new E49.2 / E49.7 Review/Rewrite TF and a new SNARF to revise SEMI E49.4-0298 Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment and E49.5-1104 Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment with the possibility of merging them. Since the SNARF had not been issued for TC Member review in accordance with § 8.2.1 of the SEMI Standards Regulations, it will be sent for TC Member review, a request to the GCS for final approval of the SNARF.

F31, F39 & F41 Re-Write TF Activity
At the North America NA Liquid Chemicals TC Chapter meeting held July 14, in conjunction with the NA Standards SEMICON West 2015 Meetings, they approved the creation of a new SNARF to revise F41. Since the SNARF had not been issued for TC Member review in accordance with § 8.2.1 of the SEMI Standards Regulations, it will be sent for TC Member review, a request to the GCS for final approval of the SNARF, and a request to the GCS to approve a Letter Ballot for Cycle 7.

IX Resin TF Activity
At the North America NA Liquid Chemicals TC Chapter meeting held July 14, in conjunction with the NA Standards SEMICON West 2015 Meetings, they approved the revision of SNARF 5621 to create a New Standard: Guide for Determining Ion Exchange Resin Contamination Contribution in High Purity Application. Since the SNARF had not been issued for TC Member review in accordance with § 8.2.1 of the SEMI Standards Regulations, it will be sent for TC Member review and a request to the GCS for final approval of the SNARF. They also approved their intention to approve this Draft Document as a Preliminary Standard at the NA Fall Standards meeting.

Next Meeting
Fall NA Standards Meetings
November 2-5, 2015
SEMI Headquarters
3081 Zanker Road
San Jose, CA 95134
U.S.A.

Monday, November 2
- E49.2 / E49.7 Review/Rewrite TF (9:00 AM to 10:30 AM)
- E49.4 / E49.5 Evaluation TF (10:30 AM to 12:00 PM)
- Ion Exchange (IX) Resin TF (2:00 PM to 3:00 PM)
- Ultra Pure Water Filtration Efficiency TF (3:00 PM to 5:00 PM)

Tuesday, November 3
- Joint F57 Revision/F40 Rewrite TFs (9:00 AM to 10:00 AM)
- SEMI F31, F39 & F41 Re-Write TF (10:00 AM to 11:00 AM)
- Analytical Methods TF (11:00 AM to 12:00 PM)

- Liquid Chemicals TC Chapter (2:00 PM to 5:00 PM)