SEMI International Standards
Standards Locale: North America
Committee: Information & Control
Place of Meeting: SEMI HQ, Milpitas, CA
Date of Meeting: 11/07/2019
Meeting End Date: 11/07/2019
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 11/13/2019


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
Graphical User Interface (GUI) TFn/aTami Tracey (Cimetrix)


Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6532Reapproval to SEMI E148-1109 (Reapproved 0614): Specification for Time Synchronization and Definition of the TS-Clock Object
Failed
R6348BRevision to E30-0418: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
Passed
6344ANew Standard: Specification for Protocol Buffers Semiconductor Common Components
Passed
6346ARevision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015: Specification for Equipment Client Authentication and Authorization
Failed
6527Revision to SEMI E125-0414: Specification for Equipment Self Description (EqSD)
Failed
6571Revision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization
Failed
6553Revision to SEMI E134-MMYY: Specification for Data Collection Management
Failed
6563Reapproval to SEMI E54.18-0914: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
Passed
6564Reapproval to SEMI E54.22-0914: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
Passed
6562Line-item Revision to SEMI E54.23-0914: Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network
Passed
SEMI E54.23-0914Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network (Unballoted Type II editorial change for handling trademarks)
Passed

Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.
#
Type
SC/TF/WG
Details
6571SNARFDDA TFRevision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization
SNARF and ballot for Cycle 7-19 approved by GCS 07/31/2019
6572SNARFGEM 300 TFRevision to SEMI E30-0418: Specification for The Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SNARF and ballot for Cycle 7-19 approved by GCS 07/31/2019
6573SNARFABFI TFLine Item Revision to SEMI E142-0211 (Reapproved 1016): Specification for Substrate Mapping
SNARF and ballot for Cycle 7-19 approved by GCS 08/19/2019
6344SNARFDDA TFNew Standard: Specification for Protocol Buffers Common Components
Revised SNARF approved by GCS 09/03/2019
6345SNARFDDA TFRevision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Self Description (EqSD) to SEMI E125-0414: Specification for Equipment Self Description (EqSD)
Revised SNARF approved by GCS 09/03/2019
6346SNARFDDA TFRevision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015: Specification for Equipment Client Authentication and Authorization
Revised SNARF approved by GCS 09/03/2019
6347SNARFDDA TFRevision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data Collection Management to SEMI E134-0414: Specification for Data Collection Management
Revised SNARF approved by GCS 09/03/2019


Authorized Activities

#
Type
SC/TF/WG
Details
6596SNARFABFI TFLine Item Revision to E142-0211 (Reapproved 1016): Specification for Substrate Mapping
New SNARF approved by TC
6597SNARFGEM 300 TFLine Item Revision to SEMI E173-0415E: Specification for XML SECS-II Message Notation (SMN)
New SNARF approved by TC
6598SNARFGEM 300 TFLine Item Revision to SEMI E37-1018: Specification for High Speed Secs Message Services (HSMS) Generic Services and E37.1-XXYY: Specification for High-Speed Secs Message Service Single Selected-Session Mode (HSMS-SS)
New SNARF approved by TC


Authorized Ballots

#
When
TF
Details
6596Cycle 2-2020 ABFI TFLine Item Revision to SEMI E142-0211 (Reapproved 1016): Specification for Substrate Mapping
6552Cycle 2-2020 GEM 300 TFLine Item Revision to SEMI E5-0219: Specification For SEMI Equipment Communications Standard 2 Message Content (SECS-II)
6597Cycle 2-2020 GEM 300 TFLine Item Revision to SEMI E173-0415E: Specification for XML SECS-II Message Notation (SMN)
6598Cycle 2-2020 GEM 300 TFLine Item Revision to SEMI E37-1018: Specification for High Speed Secs Message Services (HSMS) Generic Services and E37.1-XXYY: Specification for High-Speed Secs Message Service Single Selected-Session Mode (HSMS-SS)
6566Cycle 2-2020 CDS TFNew Standard: Specification for Malware Free Equipment Integration
6346BCycle 2-2020 DDA TFRevision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization
6347ACycle 2-2020 DDA TFRevision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data
Collection Management to SEMI E134-0414: Specification for Data Collection Management
6527ACycle 2-2020 DDA TFRevision to SEMI E125-0414: Specification for Equipment Self Description (EqSD)
6571ACycle 2-2020 DDA TFRevision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization
6553ACycle 2-2020 DDA TFRevision to SEMI E134-MMYY: Specification for Data Collection Management


SNARF(s) Granted a One-Year Extension

#
TF
Title
Expiration Date
6124GUI TFRevision to SEMI E95-1101: Specification for Human Interface for Semiconductor Manufacturing Equipment11/06/2020


SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

Next Meeting (Tentative) Date, time, location, event:


Monday, March 30, 2020, SEMI HQ, Milpitas CA

    · North America I&C Leadership (12:00 Noon – 1:00 PM)
    · I&C GCS (1:00 PM – 1:30 PM)
    · GEM300 TF (1:30 PM – 4:00 PM)
    · ABFI TF (4:00 PM – 6:00 PM)
    Tuesday, March 31, 2020, SEMI HQ, Milpitas CA
      · I&C GUI TF (8:00AM –9:00 AM)
      · PCS TF (9:00 AM – 10:00 AM)
      · Sensor Bus (SB) TF (10 AM – 11:00 AM)
      · Energy Saving Equipment Communication (ESEC) TF (9:00 AM – 10:30 AM) - <tentative pending confirmation;>
      · Fab & Equipment Computer and Device Security (CDS) TF (11:00 AM – 1:00 PM)
      · DDA TF (1:00 PM – 5:30 PM)
    Wednesday, April 1, 2020, SEMI HQ, Milpitas CA
      · I&C Committee (8:00 AM – 2:00 PM)