SEMI International Standards
Standards Locale: Japan |
Committee: Facilities & Gases |
Place of Meeting: SEMI Japan, Tokyo, Japan |
Date of Meeting: 04/04/2014 |
Meeting End Date: 04/04/2014 |
|
Recording SEMI Standards Staff: Naoko Tejima |
CER Posted to Web: 04/17/2014 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5686 | Reapproval of SEMI F80-0309, Test Method for Determination of Gas Change/Purge Efficiency of Gas Delivery System” | Passed as balloted | 5686_Ballot_Report.pdf |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
SEMI Japan Standards Summer 2014 Meetings
Friday, July 4, 2014, 15:00-17:00, SEMI Japan, Tokyo, Japan
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