SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: SEMI HQ, San Jose, CA
Date of Meeting: 11/10/2016
Meeting End Date: 11/10/2016
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 11/15/2016


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
4683JLine Item Revision to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure
Line Item 1 – Delayed Revisions Related to Chemical Exposure CriteriaPassed with technical changes. Ratification Ballot will be issued in cycle 9-16.


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6099SNARFS22 Revision Task ForceLine Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
6098SNARFNA EHS TCReapproval of SEMI S3, Safety Guideline for Process Liquid Heating Systems


Authorized Ballots

#
When
SC/TF/WG
Details
R4683JCycle 9-16S2 Chemical Exposure Task ForceRatification Ballot, Line Item Revision to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure
6049Cycle 1 or 2-17S10 Revision Task ForceLine Item Revision to SEMI S10-0815E Safety Guideline for Risk Assessment and Risk Evaluation Process
4975Cycle 1 or 2-17S6 Revision Task ForceLine Item Revision to SEMI S6, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
6098Cycle 9-16NA EHS TCReapproval of SEMI S3, Safety Guideline for Process Liquid Heating System
6099Cycle 1 or 2-17S22 Revision Task ForceLine Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
5970ACycle 1 or 2-17Fire Protection Task ForceLine Item Revisions to SEMI S14, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
April 6, 2017 9 AM - 6 PM PDT at SEMI HQ in Milpitas, CA in conjunction with NA Spring meetings. Check www.semi.org/en/standards for latest update.

Draft schedule for task forces and TC Chapter is provided below.

Spring2017_Draft Schedule.xlsSpring2017_Draft Schedule.xls