SEMI International Standards
| Standards Locale: North America |
| Committee: EHS |
| Place of Meeting: SEMI Headquarters in San Jose, California |
| Date of Meeting: 10/31/2013 |
| Meeting End Date: 10/31/2013 |
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| Recording SEMI Standards Staff: Paul Trio |
| CER Posted to Web: 11/13/2013 |
Leadership Changes
Group | Previous Leader | New Leader |
| S2 Ladders & Steps Task Force | | Lindy Austin (Salus) has been appointed as new TF co-leader serving with Ron Macklin (Macklin & Associates) and Carl Wong (AKT). |
| S10 Task Force | | Bert Planting (ASML) and Thomas Pilz (Pilz GmbH) will lead the new S10 TF. |
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
4316J | Line Item Revision to SEMI S2-0712a, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22-0712, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment. Delayed Revision Related to Programmable Safety Circuits | |  |
Line Item 1 | Fail-to-safe Equipment Control Systems Revision | Failed, to be reballoted | |
5009B | Line Item Revisions to SEMI S8-0712, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment. Delayed Revisions on Multiple Topics | |  |
Line Item 1 | Changes to Terminology for Critical Controls and Displays | Passed with editorial changes | |
Line Item 2 | Ergonomic Clearances Clarification | Failed, to be reballoted | |
Line Item 3 | Changes to Appendix 1: “Actual/Conforms?” Column Modifications | Passed as balloted | |
Line Item 4 | Changes to Appendix 1, ¶ 6.4.1: Ball Handle Minimum Diameter | Passed as balloted | |
Line Item 5 | Changes to Appendix 1, § 7: New Whole Body Clearance Criteria and Movement of Select Criteria to a New Maintenance and Service Section | Failed, to be reballoted | |
Line Item 6 | Changes to Appendix 1, § 9: Hand Control Location Applications | Passed as balloted. Superclean | |
Line Item 7 | Changes to Appendix 1, ¶ 9.1: Hand Control Location Pictogram Addition | Passed as balloted. Superclean | |
5649 | Delayed Line Item Revisions to SEMI S22, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment | |  |
Line Item 1 | Termination of the Supply Conductors | Failed, to be reballoted | |
Line Item 2 | Modification to Main Disconnecting Means Guarding | Failed, to be reballoted | |
Line Item 3 | Modification to Uninterruptible Power Supply Interruption | Failed, to be reballoted | |
Line Item 4 | Modification to Local Lighting Overcurrent Protection Criteria | Passed as balloted | |
Line Item 5 | Modification to Electrical Motor Criteria | Failed, to be reballoted | |
Line Item 6 | Addition of Motor Overload Test Method | Passed as balloted | |
Line Item 7 | Grounding Criteria | Failed, to be reballoted | |
Line Item 8 | Modification to Phase Marking | Passed as balloted | |
Line Item 9 | Modification to Cord and Plug Disconnect Criteria | Passed with editorial changes | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the committee.
# | Type | SC/TF/WG | Details |
| --- | TFOF | S10 Task Force | New task force
Charter:
To update the SEMI S10 (Safety Guideline for Risk Assessment and Risk Evaluation Process) based on negatives received in the S10 reapproval ballot (Draft Document #5599)
Scope:
- Look at better definitions in the severity table
- Discuss the likelihood table and how to define frequency
- General update
- Update Appendices/Related Information to latest standards |
| 5681 | SNARF | S6 Revision TF | Revision to SEMI S6, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
Rationale:
S6 Reapproval Ballot resulted in several negatives. TF will work to address negatives submitted to existing document.
Scope:
SEMI S6 – 0707 Document
Will not only include negatives received on reapproval ballot but other sections of S6. |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents approved by the committee for letter ballot.
# | When | SC/TF/WG | Details |
| 4683C | Cycle 8, 2013 | S2 Chemical Exposure TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revisions Related to Chemical Exposure |
| 4316K | Cycle 1, 2014 | S22 TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
Delayed Revision Related to Programmable Safety Circuits |
| 5625 | Cycle 1, 2014 | S2 Non-ionizing Radiation TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed revisions related to non-ionizing radiation |
| 5649A | Cycle 1, 2014 | S22 TF | Delayed Line Item Revisions to SEMI S22, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment |
| 4449E | Cycle 2, 2014 | S2 Ladders & Steps TF | Delayed Line Item Revision to SEMI S2-0712, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Line Item Revisions related to Work at Elevated Locations and Design Criteria for Platforms, Steps, and Ladders |
| 5009C | Cycle 2, 2014 | Ergonomics TF | Line Item Revisions to SEMI S8-0712, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment. Delayed Revisions on Multiple Topics |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
SEMI S2 to Machinery Directive Mapping
The S2 to Machinery Directive Mapping Task Force has completed its initial mapping of SEMI S2 to the Machinery Directive (2006/42/EC) Essential Health and Safety Requirements. The TF plans to publish its work as an auxiliary document. The TF also plans to identify priority S2/Machinery Directive gaps for possible future revisions to SEMI S2 (publish deltas as Related Information in S2). Prior to the publication of an auxiliary document, however, the TF would first like to request EHS committee members to review and provide comments on their initial assessment. A formal request for EHS committee member feedback will be sent out as soon as possible. Please contact Paul Trio (ptrio@semi.org) at SEMI for any questions or concerns.
Next Meeting
North America Standards Spring 2014 Meetings
March 31 – April 3, 2014
SEMI Headquarters
3081 Zanker Road
San Jose, California 95134
Monday, March 31
- S22 (Electrical Safety) TF (9:00 AM to 10:30 AM)
- Hazardous Energy Control Isolation Devices TF (10:30 AM to 12:00 Noon)
- EHS Process Meeting / Lunch Break (12:00 Noon to 1:00 PM)
- S2 Non-Ionizing Radiation TF (1:00 PM to 2:00 PM)
- S2 Chemical Exposure TF (2:00 PM to 3:30 PM)
- S6 Revision TF (3:30 PM to 5:00 PM)
- Seismic Liaison TF (5:00 PM to 6:00 PM)
Tuesday, April 1
- Fire Protection TF (9:00 AM to 10:30 Noon)
- S10 Revision TF (11:00 AM to 12:00 Noon)
- Fail-Safe Fault-Tolerant TF (1:00 PM to 2:00 PM)
- S1 Revision TF (2:00 PM to 3:30 PM)
- S2 Ladders & Steps TF (3:30 PM to 5:00 PM)
- S23 Revision Japan TF (5:00 PM to 6:00 PM)
Wednesday, April 2
- [ICRC (9:00 AM to 12:00 Noon)]
- EHS Leadership Meeting / Lunch Break (12:00 Noon to 1:00 PM)
- S2 Machinery Directive Mapping TF (1:00 PM to 2:00 PM)
- MESSC (2:00 PM to 4:00 PM)
- S8 Ergonomics TF (4:00 PM to 5:30 PM)
Thursday, April 3
- EHS Committee (9:00 AM to 6:00 PM)
For more information about the NA Standards Spring 2014 meetings, please visit: semi.org/standards
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