SEMI International Standards
Standards Locale: North America
Committee: Information & Control
Place of Meeting: SEMI HQ
Date of Meeting: 04/13/2016
Meeting End Date: 04/13/2016
Recording SEMI Standards Staff: James Amano
CER Posted to Web: 04/13/2016


Leadership Changes

Group
Previous Leader
New Leader
TC ChapterLance Risttbd
ESEC TFGino CrispieriAndreas Neuber


Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5274GRevision to Add a New Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENSen) to SEMI E54-0413, Sensor/Actuator Network StandardRatification Ballot to be issued
5821BNew Standard: Specification for Subsystem Energy Saving Mode Communication (SESMC)Failed
5912Line Item Revisions to: E142.1-0211, XML Schema for Substrate Mapping, E142.2-0211, SECS II Protocol for Substrate Mapping, and E142.3-0211, Web Services for Substrate Mapping, to correct nonconforming titles
LI 1Correct Nonconforming Title of SEMI E142.1 0211Failed
LI 2Correct Nonconforming Title of SEMI E142.2 0211Failed
LI 3Correct Nonconforming Title of SEMI E142.3 0211Failed
5913Reapproval for SEMI E157-0611, Specification for Module Process TrackingPassed
5914Reapproval for SEMI E54.3-0698 (Reapproved 1110), Specification for Sensor/Actuator Network Specific Device Model for Mass Flow DevicePassed



Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6005SNARFGEM300 TFLI Revision to E30: Add SMN
6008SNARFDDA TFNew Auxiliary Information: Equipment Data Acquisition (EDA) Freeze Version Overview
6009SNARFDDA TFLine Item Revision to E132, E132.1.
6020SNARFGEM300 TFLine Item Revision to SEMI E30.1: Inspection and Review Specific Equipment Model (ISEM) to correct nonconforming title
6021SNARFGEM300 TFLine Item revision to SEMI E123: Standard for Handler Equipment Specific Equipment Model (HSEM) to correct nonconforming title
6022SNARFDDA TFLine Item Revision to SEMI E138: XML Semiconductor Common Components to correct nonconforming title
6023SNARFGEM300 TFLine Item revision to SEMI E122: Standard for Tester Equipment Specific Equipment Model (TSEM) to correct nonconforming title
6024SNARFGEM300TFReapproval of SEMI E30.5: Specification for Metrology Specific Equipment Model (MSEM)
6025SNARFNA I&C Committee
5-Year Review		Reapproval of SEMI E142: Specification for Substrate Mapping
TBASNARFNA I&C Committee
5-Year Review		Reapproval of E54.10: Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device
TBASNARFNA I&C Committee
5-Year Review		Reapproval of SEMI E109: Specification for Reticle and Pod Management (RPMS)
TBASNARFNA I&C Committee
5-Year Review		Reapproval of SEMI E121: Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
TBASNARFNA I&C Committee
5-Year Review		Reapproval of SEMI E130: Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
TBASNARFNA I&C Committee
5-Year Review		Reapproval of SEMI E151: Guide for Understanding Data Quality
TBASNARFNA I&C Committee
5-Year Review		Reapproval of SEMI E160: Specification for Communication of Data Quality


Authorized Ballots

#
When
SC/TF/WG
Details
5549Cycle 5-2016GEM300 TFRevision to SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM) with title change to: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
R5274GCycle 4 or 5, 2016Sensor Bus TFRevision to add a New SEMI E54 Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model for Generic Equipment add-on Sensor (ADDON)
5716Cycle 5 or 6, 2016PCS TFRevisions to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS)
5821CCycle 4 or 5, 2016Energy Saving Equipment Communication Task ForceNew Standard: Specification for Energy Savings Mode Communication between Semiconductor Equipment and Sub-Systems
5872Cycle 5, 2016GEM300 TFLine Item Revisions to SEMI E172, Specification for SECS Equipment Data Dictionary (SEDD)
5912ACycle 5, 2016GEM300 TFLine Item Revisions to:
- SEMI E142.1 -0211, XML Schema for Substrate Mapping
- SEMI E142.2-0211, SECS II Protocol for Substrate Mapping
- SEMI E142.3-0211, Web Services for Substrate Mapping
To correct nonconforming titles
6020Cycle 5, 6, or 7, 2016GEM300 TFLine Item revision to SEMI E30.1: Inspection and Review Specific Equipment Model (ISEM) to correct nonconforming title
6021Cycle 5, 6, or 7, 2016GEM300 TFLine Item revison to SEMI E123: Standard for Handler Equipment Specific Equipment Model (HSEM) to correct nonconforming title
6022Cycle 5, 6, or 7, 2016NA I&C Committee
5-Year Review		Line Item revision to SEMI E138: XML Semiconductor Common Components to correct nonconforming title
6023Cycle 5, 6, or 7, 2016GEM300 TFRevision to SEMI E122: Standard for Tester Equipment Specific Equipment Model (TSEM) to correct nonconforming title
6024Cycle 5, 6, or 7, 2016NA I&C Committee
5-Year Review		Reapproval of SEMI E30.5: Specification for Metrology Specific Equipment Model (MSEM)
6025Cycle 5, 6, or 7, 2016NA I&C Committee
5-Year Review		Reapproval of SEMI E142: Specification for Substrate Mapping
TBACycle 5, 6, or 7, 2016NA I&C Committee
5-Year Review		Reapproval of E54.10: Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device
TBACycle 5, 6, or 7, 2016NA I&C Committee
5-Year Review		Reapproval of SEMI E109: Specification for Reticle and Pod Management (RPMS)
TBACycle 5, 6, or 7, 2016NA I&C Committee
5-Year Review		Reapproval of SEMI E121: Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
TBACycle 5, 6, or 7, 2016NA I&C Committee
5-Year Review		Reapproval of SEMI E130: Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
TBACycle 5, 6, or 7, 2016NA I&C Committee
5-Year Review		Reapproval of SEMI E151: Guide for Understanding Data Quality
TBACycle 5, 6, or 7, 2016NA I&C Committee
5-Year Review		Reapproval of SEMI E160: Specification for Communication of Data Quality


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
The committee voted to allow the following Standards to go inactive:
E54.13: Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM)
E139: Specification for Recipe and Parameter Management (RaP)

Next Meeting
Proposed Meeting Schedule for SEMICON West 2016 Meetings
      · Monday, July 11
        o I&C Leadership (12:00 Noon – 1:00 PM)
        o DDA (1:00 PM – 3:00 PM)
        o PCS (3:00 PM – 5:00 PM)
        o I&C GCS (5:00 PM – 5:30 PM)
      · Tuesday, July 12
        o Energy Saving Equipment Communication (8:00 AM – 12:00 noon)
        o GEM300 (1:00 PM – 3:30 PM)
        o Sensor Bus (3:30 PM – 6:00 PM)
      · Wednesday, July 13
        o I&C Committee (8:00 AM – 4:30 PM)