SEMI International Standards
Standards Locale: North America |
Committee: Facilities & Gases |
Place of Meeting: OVTCCM |
Date of Meeting: 02/22/2021 |
Meeting End Date: |
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Recording SEMI Standards Staff: Laura Nguyen |
CER Posted to Web: 03/09/2021 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
Facilities |
None | | |
Gases |
Heater Jacket Task Force | David Colquhoun (BriskHeat) | Adam Goler (Pivotal Systems)
David Colquhoun (BriskHeat) |
Committee Structure Changes
None.
Ballot Results
The following Letter Ballot Reviews were approved by GCS to be transferred to the Japan Gases TC Chapter and adjudicated on December 22, 2020.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
Facilities |
None | | | |
Gases |
6656 | Line Item Revision to SEMI C3.6-0710 (Reapproved 0815), Specification for Phosphine (PH3) in Cylinders, 99.98% Quality | | Ballot Line-Item report template_6656_20201211.pdf |
Line Item 1 | Update “Referenced Standards and Documents” Section. | Passed, as balloted | |
Line Item 2 | Change “Specifications” section heading to “Requirements” per Procedure Manual. | Passed, as balloted | |
Line Item 3 | Address trademark(s) per Regulations § 16.4.4. | Passed, as balloted | |
6657 | Line Item Revision to SEMI C3.35-1109E (Reapproved 0815), Specification for Hydrogen Chloride (HCI), 99.997% Quality | | Ballot Line-Item report template_6657_20201211r1.pdf |
Line Item 1 | Change “Specifications” section heading to “Requirements” per Procedure Manual. | Passed, as balloted | |
Line Item 2 | Address trademark(s) per Regulations § 16.4.4. | Passed, as balloted | |
6658 | Line Item Revision to SEMI C71-0815, Specification and Guide for Boron Trichloride (BCI3) | | Ballot Line-Item report template_6658_20201211.pdf |
Line Item 1 | Update “Referenced Standards and Documents” Section. | Passed, as balloted | |
Line Item 2 | Address trademark(s) per Regulations § 16.4.4. | Passed, as balloted | |
6616 | Revision to SEMI E12-1213, Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers | Passed, as balloted | Ballot Report Template_6616_20201211.pdf |
6623 | Reapproval for SEMI F72-0214, Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components | Passed, with editorial change(s) | Ballot Report Template_6623_20201211.pdf |
6643 | New Standard: Specification for Location and Dimensions for Power Connectors and EtherCAT Ports in Mass Flow Controllers and Mass Flow Meters | Failed | |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
Facilities |
6628 | SNARF | BIM TF | New Standard: Guide for Facilities Data Package for Semiconductor Equipment Installation and Building Information Modeling
– TC Member Review took place between 11/20/2019-12/03/2019
– Approved by GCS on 01/20/2020 |
6628 | Ballot Authorization | BIM TF | New Standard: Guide for Facilities Data Package for Semiconductor Manufacturing Equipment Installation and Building Information Modeling
– Approved by GCS on 01/06/2021 |
Gases |
6616 | SNARF | Mass Flow Controller TF | New Standard: Guide for Facilities Data Package for Semiconductor Manufacturing Equipment Installation and Building Information Modeling
– Approved by GCS on 01/06/2021 |
6616 | Ballot Authorization | Mass Flow Controller TF | Revision to SEMI E12-1213, Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
– Approved by GCS on 01/17/2020 |
6656 | SNARF/ Ballot Authorization | Gases Specification TF | Line Item Revision to SEMI C3.6-0710 (Reapproved 0815), Specification for Phosphine (PH3) in Cylinders, 99.98% Quality
–Approved by GCS on 05/29/2020 |
6657 | SNARF/ Ballot Authorization | Gases Specification TF | Line Item Revision to SEMI C3.35-1109E (Reapproved 0815), Specification for Hydrogen Chloride (HCI), 99.997% Quality
–Approved by GCS on 05/29/2020 |
6658 | SNARF/ Ballot Authorization | Gases Specification TF | Line Item Revision to SEMI C71-0815, Specification and Guide for Boron Trichloride (BCI3)
–Approved by GCS on 05/29/2020 |
6643 | SNARF/ Ballot Authorization | Mass Flow Controller TF | New Standard: Specification for Location and Dimensions for Power Connectors and EtherCAT ports for Mass Flow Meters and Mass Flow Controllers
– TC Member Review took place between 03/23/2020-04/05/2020
– Approved by GCS on 04/20/2020 |
- | Adjudication Locale Transfer | Gases NA TC Chapter | Transfer responsibilities for Letter Ballot review from the North America Chapter to the Japan Chapter for NA Ballots 6616, 6623, 6643, 6656, 6657, and 6658.
–Approved by GCS on 12/02/2020 |
Authorized Activities
Listing of all revised or new SNARF(s) approved by the TC Chapter.
# | Type | SC/TF/WG | Details |
Facilities |
TBD | SNARF | Facilities NA | Reapproval of SEMI E76, F49, F50, E70, E6. |
Gases |
TBD | SNARF | Gases NA | Reapproval of SEMI F43, F59, F67, F68, F72, F79, F105, F60, F73, F28, E77, F77, E80, C3.34, and C3.12. |
TBD | SNARF | Gases NA | Line Item SNARFs for SEMI C88, C91, and C92. |
#1: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the TC Chapter for Letter Ballot.
# | When | TF | Details |
Facilities |
TBD | Cycle 4, 5 and, 6-2021 | Facilities NA | Reapproval of SEMI E76, F49, F50, E70, E6. |
Gases |
TBD | Cycle 4, 5 and, 6-2021 | Gases NA | Reapproval of SEMI F43, F59, F67, F68, F72, F79, F105, F60, F73, F28, E77, F77, E80, C3.34, and C3.12. |
6582 | Cycle 5-2021 | Materials of Construction of Gas Delivery Systems TF | Test Method for The Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas Systems |
6643A | Cycle 3-2021 | Mass Flow Controller | New Standard: Specification for Location and Dimensions for Power Connectors and EtherCAT Ports in Mass Flow Controllers and Mass Flow Meters |
TBD | Cycle 4-2021 | Gases NA | Line Item SNARF for SEMI C88, C91, and C92. |
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
Facilities |
None | | | |
Gases |
6394 | Materials of Construction of Gas Delivery Systems TF | Line Item Revision to SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems | 02/22/2022 |
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for July 12-13, 2021 TBD [Hybrid]. For more information, please visit the Standards Calendar at http://www.semi.org/standards.
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