SEMI International Standards
Standards Region: Europe
Committee: Silicon Wafer
Place of Meeting: Munich, Germany
Date of Meeting: 11/13/2019
Recording SEMI Standards Staff: James Amano
CER Posted to Web: 11/21/2019


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6574Reapproval of SEMI M58-1109 (Reapproved 0614)E Test Method For Evaluating DMA Based Particle Deposition Systems And ProcessesPassed



Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6462SNARF revisionInt'l Polished Wafer TFLine Item Revision to SEMI M1-0918 Specification for Polished Single Crystal Silicon Wafers: Move Flatness and Shape Illustrations to Related Information - activity moved from AWG TF to IPW TF
6613SNARFAdvanced Wafer Geometry TFReapproval of SEMI M20-0215, Practice for Establishing a Wafer Coordinate System


Authorized Ballots

#
When
TF
Details
6363Cycle 1, 2, 3, or 4-2020Advanced Surface Inspection TFRevision of SEMI M52-0214: Guide For Specifying Scanning Surface Inspection Systems For Silicon Wafers For The 130 Nm To 11 Nm Technology Generations
6462Cycle 1, 2, 3, or 4-2020Int'l Polished Wafer TFLine Item Revision to SEMI M1-0918 Specification for Polished Single Crystal Silicon Wafers: Move Flatness and Shape Illustrations to Related Information - activity moved from AWG TF to IPW TF
6613Cycle 1, 2, 3, or 4-2020Advanced Wafer Geometry TFReapproval of SEMI M20-0215, Practice for Establishing a Wafer Coordinate System



SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Abolished
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
In conjunction with SEMICON Europa 2020 in Munich, Germany. Check the events page at https://www.semi.org/en/collaborate/standards for details.