SEMI International Standards
Standards Region: North America
Committee: Facilities & Gases
Place of Meeting: SEMI Headquarters, Milpitas, California/USA
Date of Meeting: 11/05/2019
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 11/20/2019


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
Facilities
Building Information Modeling (BIM) for Semiconductor Capital Equipment Task ForceBen Bruce (Applied Materials)Michael Potts (Exyte)
Gases
Mass Flow Controller Task ForceOpenKelly McDonough (Pivotal Systems)


Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
Facilities
None
Gases
6290CNew Standard: Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and ComponentsPassed, as balloted6290C_Ballot Review.pdf6290C_Ballot Review.pdf
6291CNew Standard: Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and ComponentsPassed, as balloted6291C_Ballot Review.pdf6291C_Ballot Review.pdf
6441ARevision to add a New Subordinate Standard, Test Method for Determination of Particle Contribution of Gas Delivery System and its Components through Dynamic (Pulse) Testing, to SEMI F70-0611 (Reapproved 0517), Test Method for Determination of Particle Contribution of Gas Delivery SystemPassed, as balloted6441A_Ballot Review.pdf6441A_Ballot Review.pdf
6457Revision to SEMI F38-0699, Test Method for Efficiency Qualification of Point-of-Use Gas FiltersPassed, as balloted6457_Ballot Review.pdf6457_Ballot Review.pdf
6477Revision to SEMI F112-0613 Test Method for Determination of Moisture Dry Down Characteristics of Surface Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)Passed, as balloted6477_Ballot Review.pdf6477_Ballot Review.pdf
6492ALine Item Revision to SEMI C3.32-0614, Specification for Chlorine (Cl2), 99.996% Quality
Line Item 1Address trademark(s) per Regulations Section 16.4.4Passed, as balloted6492A_Ballot Review.pdf6492A_Ballot Review.pdf
6493ALine Item Revision to SEMI C3.37-0614, Specification for Hexafluoroethane (C2F6), 99.97% Quality
Line Item 1Address trademark(s) per Regulations Section 16.4.4Passed, as balloted6493A_Ballot Review.pdf6493A_Ballot Review.pdf
#1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

#2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.



Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
Facilities
None
Gases
6582SNARFMaterials of Construction of Gas Delivery Systems TFNew Standard: Test Method for Measuring Pitting Resistance of Stainless Steel Component
– TC Member Review took place between 08/09/2019-08/23/2019
– Approved by GCS on 09/04/2019


Authorized Activities
Listing of all revised or new SNARF(s) approved by the TC Chapter.
#
Type
SC/TF/WG
Details
Facilities
None
Gases
6612SNARFMaterials of Construction of Gas Delivery Systems TFNew Subordinate Standard: Test Method for the Determination of Conductance of Fluid Handling Components at Subatmoshperic and Vacuum Pressure, to SEMI F32-0211
– TC Member Review took place between 10/21/2019-11/03/2019
#1: SNARFs and TFOFs are available for review on the SEMI Web site at:

http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots
Listing of documents authorized by the TC Chapter for Letter Ballot.
#
When
TF
Details
Facilities
None
Gases
6623Cycle 9-2019, 1-2020, or 2-2020Materials of Construction of Gas Delivery Systems TFReapproval for SEMI F72-0214, Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components
– Authorized new SNARF



SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Abolished

#
TF
Title
Facilities
5155BIM TFNew Standard: Guide for Facilities Data Package for Semiconductor Equipment Installation
– Abolish SNARF. Expired. Reissue new SNARF for two-week TC Member Review followed by GCS approval.
6037Power Grid Harmonics TFNew Standard: Specification for Power Grid Harmonics Compatibility
– Abandon SNARF. Expired. Activity is no longer active.
6313NA Facilities CommitteeReapproval of SEMI F47-0706 (Reapproved 0812), Specification for Semiconductor Processing Equipment Voltage Sag Immunity
– Abolish SNARF. Expired. Activity will be taken up by the Voltage Sag Immunity TF.
Gases
None
Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next meeting is scheduled in conjunction with the NA Standards Spring 2020 Meetings at SEMI Headquarters in Milpitas, California, March 30-April 2, 2020. For more information, please visit the Standards Calendar at http://www.semi.org/standards.

Tentative Schedule:

        Monday, March 30
        Gases Task Force Meetings
            09:00-10:00 Materials of Construction of Gas Delivery Systems (TF)
            10:00-11:00 Filters and Purifiers (TF)
            11:00-12:00 Mass Flow Controller (TF)
            13:00-14:00 Gas Specification (TF)
            15:00-16:00 Heater Jacket (TF)
        Facilities Task Force Meetings
            14:00-15:00 Building Information Modeling (BIM) for Semiconductor Capital Equipment (TF)
            TBD Voltage Sag Immunity (TF)
        Tuesday, March 31
            09:00-12:00 Facilities & Gases (C)