SEMI International Standards
|Standards Region: North America|
|Committee: Facilities & Gases|
|Place of Meeting: SEMI Headquarters, Milpitas, California/USA|
|Date of Meeting: 11/05/2019|
|Recording SEMI Standards Staff: Laura Nguyen|
|CER Posted to Web: 11/20/2019|
Committee Structure Changes
|Building Information Modeling (BIM) for Semiconductor Capital Equipment Task Force||Ben Bruce (Applied Materials)||Michael Potts (Exyte)|
|Mass Flow Controller Task Force||Open||Kelly McDonough (Pivotal Systems)|
#1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
A&R Forms for Approved Ballots
|6290C||New Standard: Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components||Passed, as balloted||6290C_Ballot Review.pdf|
|6291C||New Standard: Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components||Passed, as balloted||6291C_Ballot Review.pdf|
|6441A||Revision to add a New Subordinate Standard, Test Method for Determination of Particle Contribution of Gas Delivery System and its Components through Dynamic (Pulse) Testing, to SEMI F70-0611 (Reapproved 0517), Test Method for Determination of Particle Contribution of Gas Delivery System||Passed, as balloted||6441A_Ballot Review.pdf|
|6457||Revision to SEMI F38-0699, Test Method for Efficiency Qualification of Point-of-Use Gas Filters||Passed, as balloted||6457_Ballot Review.pdf|
|6477||Revision to SEMI F112-0613 Test Method for Determination of Moisture Dry Down Characteristics of Surface Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)||Passed, as balloted||6477_Ballot Review.pdf|
|6492A||Line Item Revision to SEMI C3.32-0614, Specification for Chlorine (Cl2), 99.996% Quality|
|Line Item 1||Address trademark(s) per Regulations Section 16.4.4||Passed, as balloted||6492A_Ballot Review.pdf|
|6493A||Line Item Revision to SEMI C3.37-0614, Specification for Hexafluoroethane (C2F6), 99.97% Quality|
|Line Item 1||Address trademark(s) per Regulations Section 16.4.4||Passed, as balloted||6493A_Ballot Review.pdf|
#2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Activities Approved by the GCS between meetings of TC Chapter meeting
Listing of all revised or new SNARF(s) approved by the TC Chapter.
|6582||SNARF||Materials of Construction of Gas Delivery Systems TF||New Standard: Test Method for Measuring Pitting Resistance of Stainless Steel Component|
– TC Member Review took place between 08/09/2019-08/23/2019
– Approved by GCS on 09/04/2019
#1: SNARFs and TFOFs are available for review on the SEMI Web site at:
|6612||SNARF||Materials of Construction of Gas Delivery Systems TF||New Subordinate Standard: Test Method for the Determination of Conductance of Fluid Handling Components at Subatmoshperic and Vacuum Pressure, to SEMI F32-0211|
– TC Member Review took place between 10/21/2019-11/03/2019
Listing of documents authorized by the TC Chapter for Letter Ballot.
SNARF(s) Granted a One-Year Extension
|6623||Cycle 9-2019, 1-2020, or 2-2020||Materials of Construction of Gas Delivery Systems TF||Reapproval for SEMI F72-0214, Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components|
– Authorized new SNARF
Standard(s) to receive Inactive Status
Special Announcements of the Committee (Workshops, Programs, etc.)
|5155||BIM TF||New Standard: Guide for Facilities Data Package for Semiconductor Equipment Installation|
– Abolish SNARF. Expired. Reissue new SNARF for two-week TC Member Review followed by GCS approval.
|6037||Power Grid Harmonics TF||New Standard: Specification for Power Grid Harmonics Compatibility|
– Abandon SNARF. Expired. Activity is no longer active.
|6313||NA Facilities Committee||Reapproval of SEMI F47-0706 (Reapproved 0812), Specification for Semiconductor Processing Equipment Voltage Sag Immunity|
– Abolish SNARF. Expired. Activity will be taken up by the Voltage Sag Immunity TF.
The next meeting is scheduled in conjunction with the NA Standards Spring 2020 Meetings at SEMI Headquarters in Milpitas, California, March 30-April 2, 2020. For more information, please visit the Standards Calendar at http://www.semi.org/standards.
Monday, March 30
Gases Task Force Meetings
Facilities Task Force Meetings
09:00-10:00 Materials of Construction of Gas Delivery Systems (TF)
10:00-11:00 Filters and Purifiers (TF)
11:00-12:00 Mass Flow Controller (TF)
13:00-14:00 Gas Specification (TF)
15:00-16:00 Heater Jacket (TF)
Tuesday, March 31
14:00-15:00 Building Information Modeling (BIM) for Semiconductor Capital Equipment (TF)
TBD Voltage Sag Immunity (TF)
09:00-12:00 Facilities & Gases (C)
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