SEMI International Standards
Standards Locale: North America
Committee: MEMS / NEMS
Place of Meeting: SEMI HQ
Date of Meeting: 04/03/2017
Meeting End Date: 04/03/2017
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 04/13/2017


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
None.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
SC/TF/WG
Details
5267MEMS Microfluidics TFNew Standard: Specification for Microfluidic Port and Pitch Dimensions – Revised SNARF, went out for two-week TC member review prior to TC Chapter meeting
6176MEMS/NEMS Committee for Five-Year ReviewReapproval of SEMI MS1-0307 (Reapproved 0812), Guide to Specifying Wafer-Wafer Bonding Alignment Targets
6177MEMS/NEMS Committee for Five-Year ReviewReapproval of SEMI MS10-0912, Test Method to Measure Fluid Permeation Through MEMS Packaging Materials
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:

http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots

#
When
TF
Details
5267Cycle 4, 2017 or Cycle 5, 2017MEMS Microfluidics TFNew Standard: Specification for Microfluidic Port and Pitch Dimensions
6176Cycle 4, 2017 or Cycle 5, 2017MEMS/NEMS Committee for Five-Year ReviewReapproval of SEMI MS1-0307 (Reapproved 0812), Guide to Specifying Wafer-Wafer Bonding Alignment Targets
6177Cycle 4, 2017 or Cycle 5, 2017MEMS/NEMS Committee for Five-Year ReviewReapproval of SEMI MS10-0912, Test Method to Measure Fluid Permeation Through MEMS Packaging Materials


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
NIST Workshop on Standards for Microfluidics June 1-2, 2017 - Deadline to register: May 1, 2017
https://www.nist.gov/news-events/events/2017/06/nist-workshop-standards-microfluidics-2017

Next Meeting
The next meeting of the MEMS/NEMS NA TC Chapter is scheduled for Thursday, July 13, 2017 at the SEMICON West 2017 North America Standards Meetings in San Francisco, California.
For more information, please visit: http://www.semi.org/en/standards