SEMI International Standards
Standards Region: Japan
Committee: Metrics
Place of Meeting: Tokyo Big Sight, Tokyo, Japan
Date of Meeting: 12/12/2019
Recording SEMI Standards Staff: Chie Yanagisawao
CER Posted to Web: 12/24/2019


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6550Revision to SEMI E113-0306 (Reapproved 0518), Specification for Semiconductor Processing Equipment RF Power Delivery SystemsFailed and returned to TF for rework6650_BallotReport_Failed.pdf6650_BallotReport_Failed.pdf
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.



Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
#
When
TF
Details
6550ATBDRF Measurement liaison TFRevision to SEMI E113-0306 (Reapproved 0518), Specification for Semiconductor Processing Equipment RF Power Delivery Systems



SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Abolished
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next meeting is tentatively scheduled as follows.

Date: Friday, July 3, 2020, 14:00-17:00

Place: SEMI Japan office, Tokyo, Japan