SEMI International Standards
Committee Structure Changes
|Standards Region: Japan|
|Place of Meeting: Tokyo Big Sight, Tokyo, Japan|
|Date of Meeting: 12/12/2019|
|Recording SEMI Standards Staff: Chie Yanagisawao|
|CER Posted to Web: 12/24/2019|
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
A&R Forms for Approved Ballots
|6550||Revision to SEMI E113-0306 (Reapproved 0518), Specification for Semiconductor Processing Equipment RF Power Delivery Systems||Failed and returned to TF for rework||6650_BallotReport_Failed.pdf|
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Activities Approved by the GCS between meetings of TC Chapter meeting
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
SNARF(s) Granted a One-Year Extension
Standard(s) to receive Inactive Status
Special Announcements of the Committee (Workshops, Programs, etc.)
|6550A||TBD||RF Measurement liaison TF||Revision to SEMI E113-0306 (Reapproved 0518), Specification for Semiconductor Processing Equipment RF Power Delivery Systems|
The next meeting is tentatively scheduled as follows.
· Date: Friday, July 3, 2020, 14:00-17:00
· Place: SEMI Japan office, Tokyo, Japan
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