SEMI International Standards
Standards Locale: Japan
Committee: Silicon Wafer
Place of Meeting: Tokyo Big Sight / OVTCCM
Date of Meeting: 12/14/2022
Meeting End Date: 12/14/2022
Recording SEMI Standards Staff: Mami Nakajo
CER Posted to Web: 12/28/2022


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6860Revision of SEMI M41- 0615, Specification of Silicon-on-Insulator (SOI) for Power Device/ICsPassed with editorial change6860 A&R final.pdf6860 A&R final.pdf
6570ANew Standard: Guide for Measuring Bulk Micro Defect Density and Denuded Zone Width in Annealed Silicon Wafers by a Laser-Scattering Tomography TechniqueFailed and returned to TF for rework


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension

#
TF
Title
Expiration Date
6570International Test Methods Task ForceNew Standard: Guide for Measuring Bulk Micro Defect Density and Denuded Zone Width in Annealed Silicon Wafers by a Laser-Scattering Tomography Technique2024/04/19


SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
The next meeting is scheduled for Thursday, April 13th, 10:00am-12:00[JST](Hybrid)
Please check www.semi.org/standards for updates.