SEMI International Standards
Standards Locale: North America
Committee: Information & Control
Place of Meeting: SEMI HQ, San Jose, California
Date of Meeting: 11/09/2016
Meeting End Date: 11/09/2016
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 11/22/2016


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5872ALine Item Revision to SEMI E172-1015, Specification for SECS Equipment Data Dictionary (SEDD)Failed
6026Reapproval of SEMI E109-1110, Specification for Reticle and Pod Management (RPMS)Failed
6038Reapproval of SEMI E160-1211, Specification for Communication of Data QualityPassed
6064Reapproval for SEMI E121-0305, Guide for Style and Usage of XML for Semiconductor Manufacturing ApplicationsFailed
6065Reapproval for SEMI E151-1211, Guide for Understanding Data QualityPassed
6066Reapproval for SEMI E130-1104-0710R, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1-1104-0710R, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)Failed
6067Reapproval for SEMI E54.16-1106, Specification for Sensor/Actuator Network Communications for LonworksFailed
6068Reapprovals for SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)Failed


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6064SNARFDDA Line Item Revision to SEMI E121-0305, Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
SNARF revised and approved by TC
5716SNARFPCS Revisions to SEMI E133-1104-0710R, Specification for Automated Process Control Systems Interface and SEMI E133.1-1104-0710R, Provisional Specification for XML Messaging for Process Control Systems (PSC)
SNARF extended till 3/31/2018
6026SNARFGEM300Line Item Revision to SEMI E109-1110, Specification for Reticle and Pod Management (RPMS)
SNARF revised and approved by TC
6066SNARFGEM300Line Item Revision to SEMI E130-1104-0710R, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1-1104-0710R, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
SNARF revised and approved by TC
6068SNARFGEM300Line Item Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)
SNARF revised and approved by TC
TBDSNARFGEM300Line Item Revision to E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II)
New SNARF approved by TC
TBDSNARFSBLine Item Revision to SEMI E54.16-1106, Specification for Sensor/Actuator Network Communications for Lonworks
New SNARF for review by TC in April 2017 TC Meeting (after checking IP/LOA by SEMI)
TBDSNARFGUI Revision to SEMI E95-1101-0307R, Specification for Human Interface for Semiconductor Manufacturing Equipment
New SNARF for 2-week review and GCS approval
TBDSNARFI&C TCReapproval for SEMI E54.17-0812, Specification of Sensor/Actuator Network for A-LINK
New SNARF


Authorized Ballots

#
When
SC/TF/WG
Details
5716Cycle 2, 2017PCS Revisions to SEMI E133-1104-0710R, Specification for Automated Process Control Systems Interface and SEMI E133.1-1104-0710R, Provisional Specification for XML Messaging for Process Control Systems (PSC)
6067ACycle 2, 2017SB Reapproval for SEMI E54.10-0600 (Reapproved 1111) Specification for Sensor/Actuator Network Specific Device Model for an in Situ Particle Monitor Device
6026ACycle 2, 2017GEM300 Line Item Revision to SEMI E109-1110, Specification for Reticle and Pod Management (RPMS)
6066ACycle 2, 2017GEM300 Line Item Revision to SEMI E130-1104-0710R, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1-1104-0710R, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
6068ACycle 2, 2017GEM300 Line Item Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking and E116.1 Specification for SECS-II Protocol for Equipment Performance Tracking
5872BCycle 2, 2017GEM300 Line Item Revision to SEMI E172-1015, Specification for SECS Equipment Data Dictionary (SEDD)
5549ACycle 2, 2017GEM300 Revision to SEMI E30-0416, Generic Model for Communications and Control of Manufacturing Equipment (GEM) with title change to: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
5738Cycle 2, 2017GEM300Revision to SEMI E87.1-0707, Specification for SECS-II Protocol for Carrier Management (CMS)
6064ACycle 2, 2017DDA Line Item Revision to SEMI E121-0305, Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
TBDCycle 2, 2017I&C TCReapproval for SEMI E54.17-0812, Specification of Sensor/Actuator Network for A-LINK


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
Monday, April 3, 2017, SEMI HQ
        · NA I&C Leadership (12:00 Noon – 1:00 PM)

        · DDA (1:00 PM – 3:00 PM)

        · PCS (3:00 PM – 5:00 PM)

        · I&C GCS (5:00 PM – 5:30 PM)

Tuesday, April 4, 2017, SEMI HQ
        · I&C GUI TF (9:00AM – 5:00 PM)

        · Energy Saving Equipment Communication (9:00 AM – 12:00 noon)

        · GEM300 (1:00 PM – 4:00 PM)

        · Sensor Bus (4PM – 6:00 PM)

Wednesday, April 5, SEMI HQ
        · I&C Committee (8:00 AM – 4:30 PM)