SEMI International Standards
Standards Locale: North America |
Committee: Information & Control |
Place of Meeting: SEMI HQ, San Jose, California |
Date of Meeting: 11/09/2016 |
Meeting End Date: 11/09/2016 |
|
Recording SEMI Standards Staff: Inna Skvortsova |
CER Posted to Web: 11/22/2016 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5872A | Line Item Revision to SEMI E172-1015, Specification for SECS Equipment Data Dictionary (SEDD) | Failed | |
6026 | Reapproval of SEMI E109-1110, Specification for Reticle and Pod Management (RPMS) | Failed | |
6038 | Reapproval of SEMI E160-1211, Specification for Communication of Data Quality | Passed | |
6064 | Reapproval for SEMI E121-0305, Guide for Style and Usage of XML for Semiconductor Manufacturing Applications | Failed | |
6065 | Reapproval for SEMI E151-1211, Guide for Understanding Data Quality | Passed | |
6066 | Reapproval for SEMI E130-1104-0710R, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1-1104-0710R, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300) | Failed | |
6067 | Reapproval for SEMI E54.16-1106, Specification for Sensor/Actuator Network Communications for Lonworks | Failed | |
6068 | Reapprovals for SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT) | Failed | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
6064 | SNARF | DDA | Line Item Revision to SEMI E121-0305, Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
SNARF revised and approved by TC |
5716 | SNARF | PCS | Revisions to SEMI E133-1104-0710R, Specification for Automated Process Control Systems Interface and SEMI E133.1-1104-0710R, Provisional Specification for XML Messaging for Process Control Systems (PSC)
SNARF extended till 3/31/2018 |
6026 | SNARF | GEM300 | Line Item Revision to SEMI E109-1110, Specification for Reticle and Pod Management (RPMS)
SNARF revised and approved by TC |
6066 | SNARF | GEM300 | Line Item Revision to SEMI E130-1104-0710R, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1-1104-0710R, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
SNARF revised and approved by TC |
6068 | SNARF | GEM300 | Line Item Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)
SNARF revised and approved by TC |
TBD | SNARF | GEM300 | Line Item Revision to E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II)
New SNARF approved by TC |
TBD | SNARF | SB | Line Item Revision to SEMI E54.16-1106, Specification for Sensor/Actuator Network Communications for Lonworks
New SNARF for review by TC in April 2017 TC Meeting (after checking IP/LOA by SEMI) |
TBD | SNARF | GUI | Revision to SEMI E95-1101-0307R, Specification for Human Interface for Semiconductor Manufacturing Equipment
New SNARF for 2-week review and GCS approval |
TBD | SNARF | I&C TC | Reapproval for SEMI E54.17-0812, Specification of Sensor/Actuator Network for A-LINK
New SNARF |
Authorized Ballots
# | When | SC/TF/WG | Details |
5716 | Cycle 2, 2017 | PCS | Revisions to SEMI E133-1104-0710R, Specification for Automated Process Control Systems Interface and SEMI E133.1-1104-0710R, Provisional Specification for XML Messaging for Process Control Systems (PSC) |
6067A | Cycle 2, 2017 | SB | Reapproval for SEMI E54.10-0600 (Reapproved 1111) Specification for Sensor/Actuator Network Specific Device Model for an in Situ Particle Monitor Device |
6026A | Cycle 2, 2017 | GEM300 | Line Item Revision to SEMI E109-1110, Specification for Reticle and Pod Management (RPMS) |
6066A | Cycle 2, 2017 | GEM300 | Line Item Revision to SEMI E130-1104-0710R, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1-1104-0710R, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300) |
6068A | Cycle 2, 2017 | GEM300 | Line Item Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking and E116.1 Specification for SECS-II Protocol for Equipment Performance Tracking |
5872B | Cycle 2, 2017 | GEM300 | Line Item Revision to SEMI E172-1015, Specification for SECS Equipment Data Dictionary (SEDD) |
5549A | Cycle 2, 2017 | GEM300 | Revision to SEMI E30-0416, Generic Model for Communications and Control of Manufacturing Equipment (GEM) with title change to: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) |
5738 | Cycle 2, 2017 | GEM300 | Revision to SEMI E87.1-0707, Specification for SECS-II Protocol for Carrier Management (CMS) |
6064A | Cycle 2, 2017 | DDA | Line Item Revision to SEMI E121-0305, Guide for Style and Usage of XML for Semiconductor Manufacturing Applications |
TBD | Cycle 2, 2017 | I&C TC | Reapproval for SEMI E54.17-0812, Specification of Sensor/Actuator Network for A-LINK |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
Monday, April 3, 2017, SEMI HQ
· NA I&C Leadership (12:00 Noon – 1:00 PM)
· DDA (1:00 PM – 3:00 PM)
· PCS (3:00 PM – 5:00 PM)
· I&C GCS (5:00 PM – 5:30 PM)
Tuesday, April 4, 2017, SEMI HQ
· I&C GUI TF (9:00AM – 5:00 PM)
· Energy Saving Equipment Communication (9:00 AM – 12:00 noon)
· GEM300 (1:00 PM – 4:00 PM)
· Sensor Bus (4PM – 6:00 PM)
Wednesday, April 5, SEMI HQ
· I&C Committee (8:00 AM – 4:30 PM)
Copyright ©2024 Semiconductor Equipment and Materials International (SEMI®). All rights reserved.
|