SEMI International Standards
Standards Locale: North America
Committee: Metrics
Place of Meeting: San Francisco, CA
Date of Meeting: 07/12/2017
Meeting End Date: 07/12/2017
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 07/24/2017


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5596ANew Standard: Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing EnvironmentPassed;
Ratification Ballot to be Issued		Procedural Review_5596A.pdfProcedural Review_5596A.pdf
6144Line-item Revision to SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery SystemsFailed
6145Line-item Revision to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing EquipmentFailed
6146Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery SystemsFailed


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
6184SNARFRF Measurements TFRevision to SEMI E135-0704 (Reapproved 0512), Test Method for RF Generators to Determine Transient Response
Approved by GCS 05/15/2017


Authorized Activities

#
Type
SC/TF/WG
Details
TBDSNARFRF MeasurementsReapproval of SEMI E113-306 (Reapproved 0512), Specification for Semiconductor Processing Equipment RF Power Delivery Systems
TBDSNARFRF MeasurementsReapproval of SEMI E136-1104 (Reapproved 0512), Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems
TBDSNARFRF MeasurementsReapproval of SEMI E143-0306 (Reapproved 0512), Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at Any Phase Angle


Authorized Ballots

#
When
TF
Details
R5596ACycle
6/7-17		EMCNew Standard: Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment
6144ACycle 6-17E-COOLine-item Revision to SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
6145ACycle 6-17E-COOLine-item Revision to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
6146ACycle 7-17E-COOLine-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
TBDCycle 6/7-17RF MeasurementsReapproval of SEMI E113-306 (Reapproved 0512), Specification for Semiconductor Processing Equipment RF Power Delivery Systems
TBDCycle 6/7-17RF MeasurementsReapproval of SEMI E136-1104 (Reapproved 0512), Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems
TBDCycle 6/7-17RF MeasurementsReapproval of SEMI E143-0306 (Reapproved 0512), Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at Any Phase Angle


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

Next Meeting Standards Fall 2017 Meetings

Date, time, location, event:

Tuesday, November 7 (Tentative)

        · ESD/ESC TF (13:30 – 15:30)

        · Equipment COO TF – (15:30 – 17:00)

        · EMC TF (17:00 – 18:00)

Wednesday, November 8 (Tentative)
        · Equipment RAMP Metrics TF (9:00 – 11:00)

        · RF Measurements TF (14:00-15:00)

        · Metrics NA TC Chapter (15:00 – 18:00)

For more information, please visit Standards Calendar at http://www.semi.org/en/standards