SEMI International Standards
Standards Region: North America
Committee: Liquid Chemicals
Place of Meeting: SEMI HQ, Milpitas, CA
Date of Meeting: 11/05/2019
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 11/15/2019


Leadership Changes


WG/TF/SC/TC Name
Previous Leader
New Leader
Water Management Task Forcen/aPaul Kerr (Intel)
Slava Libman (FTD Solutions)
Chemical Mechanical Planarization Consumables (CMP-C) Task Forcen/aAlex Tregub (Intel)


Committee Structure Changes

Previous WG/TF/SC Name
New WG/TF/SC Name or Status Change
n/aWater Management Task Force [NEW TF]
n/aChemical Mechanical Planarization Consumables (CMP-C) Task Force [NEW TF]


Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6195A
Revision to SEMI F104-0312: Particle Test Method for Evaluation of Components Used in UPW and Liquid Chemicals Distribution Systems, with title change.
Passed with editorial change(s)
6195A_Ballot Review.pdf6195A_Ballot Review.pdf
6433
New Standard: Test Method for Determining Conductivity of Chemical Mechanical Polish (CMP) Slurries and Related Chemicals
Passed
6433_Ballot Review.pdf6433_Ballot Review.pdf
6559
Reapproval to SEMI C18-0714: Specification for Acetic Acid
Passed
6559_Ballot Review.pdf6559_Ballot Review.pdf
6560
Reapproval to SEMI C23-0714: Specifications for Buffered Oxide Etchants
Passed
6560_Ballot Review.pdf6560_Ballot Review.pdf
6490
Revision to SEMI C93- 0217: Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System
Passed
6490_Ballot Review.pdf6490_Ballot Review.pdf



Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6600SNARFWM TFNew Standard: Guide for Semiconductor Tool Water Reuse
New SNARF distributed for 2-week member review and approved at TC meeting
6603SNARFWM TFRevision to SEMI F98-0618: Guide for Water Reuse in Semiconductor Industry
New SNARF distributed for 2-week member review and approved at TC meeting
6601SNARFHPPM&C TFNew Standard: Guide to Meet IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
New SNARF distributed for 2-week member review and approved at TC meeting
6602SNARFCAM TFNew Standard: Test Method for Determining pH of Chemical Mechanical Planarization (CMP) Slurries and Related Chemicals
New SNARF distributed for 2-week member review and approved at TC meeting
6489SNARFCMP-C TFNew Standard: Guide for Reporting Chemical Mechanical Planarization (CMP) Polishing Pad Hardness used in Semiconductor Manufacturing
Revision of SNARF to change Task Force from HPPMC to newly formed CMP-C
approved at TC.
6606SNARFCAM TFReapproval to SEMI C69-1015: Test Method for the Determination of Surface Areas of Polymer Pellets
New SNARF approved at TC


Authorized Ballots

#
When
TF
Details
6561Cycle 1 or 2-2020HPPM&C TFLine Item Revision to SEMI F40-0699E (Reapproved 0918): Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
6575Cycle 1 or 2-2020UPW TFLine Item Revision to SEMI F61-0617: Guide to Design and Operation of a Semiconductor Ultrapure Water System
6576Cycle 1 or 2-2020UPW TFLine Item Revision to SEMI F63-0918: Guide for Ultrapure Water Used in Semiconductor Processing
6577Cycle 1 or 2-2020UPW TFLine Item Revision to SEMI F75-0617: Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing
6606Cycle 1 or 2-2020CAM TFReapproval to SEMI C69-1015: Test Method for the Determination of Surface Areas of Polymer Pellets



SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Abolished
None.

Standard(s) to receive Inactive Status

Standard Designation
Title
SEMI C53-0704 (Reapproved 0312)Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2]
SEMI C86-0415Guide for Ethylene Glycol


Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

Next Meeting - Standards Spring 2020 Meetings <tentative schedule>

Monday, March 30, 2020; SEMI HQ, Milpitas CA


    NA Liquid Chemicals Leadership Meeting (1:00PM-2:00PM)

    Chemical Analytical Methods TF (2:00PM-3:00PM)

    New CMP-C TF (3:30PM-4:30PM)

    Water Conservation Task Force (4:30PM – 5:30PM)


Tuesday, March 31, 2020; Milpitas, CA

    High Purity Polymer Materials & Components (8:30AM – 9:30AM)

    Ultrapure Water TF (9:30AM – 10:30AM)

    Liquid Chemicals TC Chapter (2:00PM – 5:00PM)



For more information, please visit Standards Calendar at http://www.semi.org/en/standards