SEMI International Standards
| Standards Locale: North America |
| Committee: Gases |
| Place of Meeting: San Francisco Marriott in San Francisco, California |
| Date of Meeting: 07/14/2015 |
| Meeting End Date: 07/14/2015 |
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| Recording SEMI Standards Staff: David Bouldin |
| CER Posted to Web: 08/13/2015 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for rework and reballoting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| Cycle 4, 2015 Ballots | | |
5667A | New Standard: Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components | Passed as balloted |  5667A_Procedure_Review rev1.docx |
R5671C | Revision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality | Passed with technical changes, Ratification Ballot required |  5671C_Procedure_Review Rev2.docx |
R5673C | Revision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality | Passed with technical changes, Ratification Ballot required |  5673C_Procedure_Review Rev2.docx |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
Listing of documents approved by the committee for Letter or Ratification Ballot.
# | When | SC/TF/WG | Details |
| 5876 | Cycle 6, 2015 | Materials of Construction of Gas Delivery Systems TF | New Standard: Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution |
| R5671C | Cycle 6, 2015 | Gases Specification TF | Revision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality |
| R5673C | Cycle 6, 2015 | Gases Specification TF | Revision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality |
| 5816A | Cycle 7, 2015 | Filters & Purifiers TF | Revision to SEMI F30 – Start Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
Filters and Purifiers TF SNARF # 5816 Revised
At the North America NA Gases TC Chapter meeting held July 14, in conjunction with the NA Standards SEMICON West 2015 Meetings, they revised the Filters and Purifiers TF reapproval activity to Revision to SEMI F30 – Start Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site (SNARF # 5816), due to the failure of the Reapproval Letter Ballot. Gases GCS approved a Cycle 7, 2015 ballot.
Pressure Measurement TF SNARF # 3440 Continuing
At the North America NA Gases TC Chapter meeting held July 14, in conjunction with the NA Standards SEMICON West 2015 Meetings, they found the Pressure Measurement TF activity, New Standard: Test Method for Pressure Measurement Devices (SNARF # 3440), to be continuing in accordance with § 8.3.2 of the SEMI Standards Regulationand granted a one-year extension.
Filters and Purifiers TF SNARF # 5244 Continuing
At the North America NA Gases TC Chapter meeting held July 14, in conjunction with the NA Standards SEMICON West 2015 Meetings, they found the Filters and Purifiers TF activity, Reapproval of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean Environments (SNARF # 5244), to be continuing in accordance with § 8.3.2 of the SEMI Standards Regulations and granted a one-year extension.
Next Meeting
Fall NA Standards Meetings
November 2-5, 2015
SEMI Headquarters
3081 Zanker Road
San Jose, CA 95134
U.S.A.
Monday, November 2
- Materials of Construction of Gas Delivery Systems TF (8:00 AM to 9:30 AM)
- Filters and Purifiers TF (9:30 AM to 11:00 AM)
- Mass Flow Controller TF (11:00 AM to 12:00 PM)
- Gases Specification TF (1:00 PM to 2:00 PM)
- Surface Mount Sandwich Component Dimensions TF (2:00 PM to 3:00 PM)
- Pressure Measurement TF (3:00 PM to 5:00 PM)
Tuesday, November 3
- Joint Facilities and Gases TC Chapters (9:00 AM to 12:00 PM)