SEMI International Standards
| Standards Locale: North America |
| Committee: Information & Control |
| Place of Meeting: San Francisco, CA |
| Date of Meeting: 07/13/2016 |
| Meeting End Date: 07/13/2016 |
 |
| Recording SEMI Standards Staff: Inna Skvortsova |
| CER Posted to Web: 07/28/2016 |
Leadership Changes
Group | Previous Leader | New Leader |
| I&C TC Chapter Co-Chair | Gino Crispieri | James Moyne, University of Michigan/AMAT |
| ESEC TF | Gino Crispieri | Andreas Neuber (AMAT) |
.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 5549 | Revision to SEMI E30, GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM) WITH TITLE CHANGE TO: SPECIFICATION FOR THE GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM) | Failed | |
| 5821C | New Standard: SPECIFICATION FOR ENERGY SAVINGS MODE COMMUNICATION BETWEEN SEMICONDUCTOR EQUIPMENT AND SUB-SYSTEMS | Approved. Ratification Ballot to be issued. |  5821C_Procedural Review.pdf |
| 5872 | Line Item Revisions TO SEMI E172, SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD). Enhancement To E172 | Failed | |
| 5912A | Line Item Revisions to: |
|
| - SEMI E142.1 -0211, XML Schema for Substrate Mapping | Passed |  5912A_Procedural Review.pdf
|
| - SEMI E142.2-0211, SECS II Protocol for Substrate Mapping | Passed |
| - SEMI E142.3-0211, Web Services for Substrate Mapping | Passed |
| To correct nonconforming titles |
|
| 6020 | Line Item revision to SEMI E30.1-0309: INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM) to correct nonconforming title | Passed |  6020_Procedural Review.pdf |
| 6021 | Line Item revison TO SEMI E123-0703 (REAPPROVED 1109): STANDARD FOR HANDLER EQUIPMENT SPECIFIC EQUIPMENT MODEL (HSEM) to correct nonconforming title | Passed |  6021_Procedural Review.pdf |
| 6022 | Line Item revision to SEMI E138-0709: XML SEMICONDUCTOR COMMON COMPONENTS to correct nonconforming title | Passed | |
|
| 6023 | Line item revision to SEMI E122: STANDARD FOR TESTER EQUIPMENT SPECIFIC EQUIPMENT MODEL (TSEM) to correct nonconforming title | Passed |  6023_Procedural Review.pdf |
| 6024 | Reapproval of SEMI E30.5: SPECIFICATION FOR METROLOGY SPECIFIC EQUIPMENT MODEL (MSEM) | Passed | |
|
| 6025 | Reapproval of SEMI E142: SPECIFICATION FOR SUBSTRATE MAPPING | Passed | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 5738 | SNARF | GEM 300 - Korea TF | Revision to SEMI E87.1, SPECIFICATION FOR SECS-II PROTOCOL FOR CARRIER MANAGEMENT (CMS); Transfer from Korea GEM 300 to NA I&C TC. Activity leader Brian Rubow. Ballot in cycle 6/7-2016 |
| TBD | TFOF | GUI TF | Graphical User Interfaces TFOF; Activity leader Frank Summers |
| 5549 | SNARF | GEM 300 TF | Revision to SEMI E30, GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)
SNARF extended for 1 year. |
| 5589 | SNARF | GEM 300 TF | Revisions to: - SEMI E30, GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM),- SEMI E30.1, INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM),- SEMI E82, SPECIFICATION FOR INTERBAY/INTRABAY AMHS SEM (IBSEM),- SEMI E88, SPECIFICATION FOR AMHS STORAGE SEM (STOCKER SEM),- SEMI E91, SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL (PSEM),- SEMI E122.1, SPECIFICATION FOR SECS-II PROTOCOL FOR TESTER SPECIFIC EQUIPMENT MODEL (TSEM), AND
- SEMI E123.1, SPECIFICATION FOR SECS-II PROTOCOL FOR HANDLER SPECIFIC EQUIPMENT MODEL (HSEM):
SNARF abolished |
| 5618 | SNARF | GEM 300 TF | New Standard: SPECIFICATION FOR PRESERVATION OF RECIPE INTEGRITY (PRI)
SNARF abolished |
| 5716 | SNARF | PCS TC | Revisions to SEMI E133, SPECIFICATION FOR AUTOMATED PROCESS CONTROL SYSTEMS INTERFACE AND SEMI E133.1, PROVISIONAL SPECIFICATION FOR XML MESSAGING FOR PROCESS CONTROL SYSTEMS (PCS)
Ballot in cycle 6/7-2016 |
| 5872A | SNARF | GEM 300 TF | Revision: SEMI E172, SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD)
Ballot in cycle 6/7-2016 |
| TBD | SNARF | I&C TC | Reapproval for SEMI E116-0707E, SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING AND SEMI E116.1-0707, SPECIFICATION FOR SECS-II PROTOCOL FOR EQUIPMENT PERFORMANCE TRACKING (EPT)
Ballot in cycle 6/7-2016 |
| TBD | SNARF | I&C TC | Reapprovals for SEMI E130, SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300) AND SEMI E130.1, SPECIFICATION FOR SECS-II PROTOCOL FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)
Ballot in cycle 6/7-2016 |
| TBD | SNARF | I&C TC | Reappoval for SEMI E109-1110, SPECIFICATION FOR RETICLE AND POD MANAGEMENT (RPMS)
Ballot in cycle 6/7-2016 |
| TBD | SNARF | I&C TC | Reapproval for SEMI E121-0305, GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS
Ballot in cycle 6/7-2016 |
| TBD | SNARF | I&C TC | Reapproval for SEMI E151-1211, GUIDE FOR UNDERSTANDING DATA QUALITY
Ballot in cycle 6/7-2016 |
| TBD | SNARF | I&C TC | Reapproval for SEMI E160-1211, SPECIFICATION FOR COMMUNICATION OF DATA QUALITY
Ballot in cycle 6/7-2016 |
| TBD | SNARF | I&C TC | Reapproval for SEMI E54.10-1106, SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR LONWORKS
Ballot in cycle 6/7-2016 |
Authorized Ballots
# | When | SC/TF/WG | Details |
| 5738 | Cycle 6/7-2016 | GEM 300 - Korea TF | Revision to E87.1, SPECIFICATION FOR SECS-II PROTOCOL FOR CARRIER MANAGEMENT (CMS); Transfer from Korea GEM 300 to NA I&C TC. Activity leader Brian Rubow. |
| 5716 | Cycle 6/7-2016 | I&C TC | Revisions to SEMI E133, SPECIFICATION FOR AUTOMATED PROCESS CONTROL SYSTEMS INTERFACE AND SEMI E133.1, PROVISIONAL SPECIFICATION FOR XML MESSAGING FOR PROCESS CONTROL SYSTEMS (PCS) |
| 5872A | Cycle 6/7-2016 | GEM 300 TF | Reapproval: SEMI E172, SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD) |
| 5318 | Cycle 6/7-2016 | I&C TC | Reapproval for SEMI E116-0707E, SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING AND SEMI E116.1-0707, SPECIFICATION FOR SECS-II PROTOCOL FOR EQUIPMENT PERFORMANCE TRACKING (EPT) |
| TBD | Cycle 6/7-2016 | I&C TC | Reapprovals for SEMI E130, SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300) AND SEMI E130.1, SPECIFICATION FOR SECS-II PROTOCOL FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300) |
| TBD | Cycle 6/7-2016 | I&C TC | Reappoval for SEMI E109-1110, SPECIFICATION FOR RETICLE AND POD MANAGEMENT (RPMS) |
| TBD | Cycle 6/7-2016 | I&C TC | Reapproval FOR SEMI E121-0305, GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| TBD | Cycle 6/7-2016 | I&C TC | Reapproval for SEMI E151-1211, GUIDE FOR UNDERSTANDING DATA QUALITY |
| TBD | Cycle 6/7-2016 | I&C TC | Reapproval for SEMI E160-1211, SPECIFICATION FOR COMMUNICATION OF DATA QUALITY |
| TBD | Cycle 6/7-2016 | I&C TC | Reapproval for SEMI E54.10-1106, SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR LONWORKS |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
# | Type | SC/TF/WG | Details |
| 5549 | SNARF | GEM 300 TF | Revision to SEMI E30, GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)
SNARF extended for 1 year. |
| TBD | TFOF | GUI TF | Graphical User Interfaces TFOF; Activity leader Frank Summers |
OTHER:
October 17-20, 2016 Advanced Process Control Conference, AZ
www.apcconference.com
(for additional information please contact James Moyne / Applied Materials / moyne@umich.edu )
Next Meeting
Monday, November 7; SEMI HQ, San Jose CA
· I&C Leadership (Noon – 1PM)
· DDA TF (1PM – 3PM)
· PCS TF (3– 5PM)
· I&C GCS (5PM – 5:30PM)
Tuesday, November 8; SEMI HQ, San Jose CA
· I&C GUI TF (9AM – 5PM)
· Energy Saving Equipment Communication TF(9AM – Noon)
· GEM300 TF (1PM – 4PM)
· Sensor Bus TF (4PM – 6PM)
Wednesday, November 9; SEMI HQ, San Jose CA
· I&C Committee (8AM – 4:30PM).
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