SEMI International Standards
Standards Locale: North America
Committee: Physical Interfaces & Carriers
Place of Meeting: San Jose, CA
Date of Meeting: 11/04/2015
Meeting End Date: 11/04/2015
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 11/16/2015


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
None.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
5950SNARFGlobal Pic Maintenance TFReapproval of SEMI E1-1110 Specification for Open Plastic and Metal Wafer Carriers
5965SNARFGlobal Pic Maintenance TFReapproval of SEMI E15-0698E2 (Reapproved 0310) Specification for Tool Load Port
5954SNARFGlobal Pic Maintenance TFReapproval of SEMI E15.1-0305 (Reapproved 1110) Specification for 300 mm Tool Load Port
5956SNARFGlobal Pic Maintenance TFLine Item Revision to SEMI E57-0600 (Reapproved 1110) Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers with Title Change to: Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
5955SNARFGlobal Pic Maintenance TFLine Item Revision to SEMI E63-1104 (Reapproved 1110) Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface with Title Change to: Specification for 300 mm Box Opener/Loader to Tool Standard Mechanical (BOLTS-M) Interface
5951SNARFGlobal Pic Maintenance TFReapproval of SEMI E100-1104 (Reapproved 0710) Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles
5952SNARFGlobal Pic Maintenance TFReapproval of SEMI E117-1104 (Reapproved 0710) Specification for Reticle Load Port
5953SNARFGlobal Pic Maintenance TFReapproval of SEMI E131-0304 (Reapproved 0310) Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M

Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots

#
When
SC/TF/WG
Details
5950Cycle 9 - 2015Global Pic Maintenance TFReapproval of SEMI E1-1110 Specification for Open Plastic and Metal Wafer Carriers
5965Cycle 9 - 2015Global Pic Maintenance TFReapproval of SEMI E15-0698E2 (Reapproved 0310) Specification for Tool Load Port
5954Cycle 9 - 2015Global Pic Maintenance TFReapproval of SEMI E15.1-0305 (Reapproved 1110) Specification for 300 mm Tool Load Port
5956Cycle 9 - 2015Global Pic Maintenance TFLine Item Revision to SEMI E57-0600 (Reapproved 1110) Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers with Title Change to: Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
5955Cycle 9 - 2015Global Pic Maintenance TFLine Item Revision to SEMI E63-1104 (Reapproved 1110) Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface with Title Change to: Specification for 300 mm Box Opener/Loader to Tool Standard Mechanical (BOLTS-M) Interface
5951Cycle 9 - 2015Global Pic Maintenance TFReapproval of SEMI E100-1104 (Reapproved 0710) Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles
5952Cycle 9 - 2015Global Pic Maintenance TFReapproval of SEMI E117-1104 (Reapproved 0710) Specification for Reticle Load Port
5953Cycle 9 - 2015Global Pic Maintenance TFReapproval of SEMI E131-0304 (Reapproved 0310) Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
NA Spring Meeting 2016
For more information, please visit: http://www.semi.org/standards