SEMI International Standards
Standards Locale: Japan
Committee: Information & Control
Place of Meeting: SEMI Japan office, Tokyo
Date of Meeting: 04/21/2017
Meeting End Date: 04/21/2017
Recording SEMI Standards Staff: Chie Yanagisawa
CER Posted to Web: 04/27/2017


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
Technical ArchitectHiroshi Kondo (Murata Machinery) and Tadashi Mochizuki (Tokyo Electron)Hiroshi Kondo stepped down and Tadashi Mochizuki remains.


Committee Structure Changes

Previous WG/TF/SC Name
New WG/TF/SC Name or Status Change
Fiducial Mark Interoperability Task ForceThe TF is under the Japan TC Chapters of Silicon Wafers, PI&C, I&C, Traceability and Assembly & Packaging. The TF’s discharge will be completed when agreed by all those TC Chapters. The Silicon Wafers agreed on March 9, Assembly & Packaging agreed on March 13 and PI&C agreed on April 19. The I&C agreed at this meeting.


Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
#6089Line Item Revision to:
‘SEMI E170-0416: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)’,
‘SEMI E170.1-0416: SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM’, and
‘SEMI E5-0813: SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)’ with title change.		6089_BallotReport.pdf6089_BallotReport.pdf
Line Item 1Revise the Message Mapping in SEMI E170.1 with some Parameter Changes in SEMI E170, and Add SECS message definitions in SEMI E5.Passed with technical changes and without editorial changes
Ratification ballot to be issued in Cycle 5-2017
Line Item 2Change nonconforming title of SEMI E5Passed as balloted
Superclean
#6090Line Item Revision to SEMI E91-0600 (Reapproved 1109), SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL (PSEM)6090_BallotReport.pdf6090_BallotReport.pdf
Line Item 1Reflect related SEMI E30 revisionsPassed as balloted
Superclean
Line Item 2Delete “provisional” related expressionsPassed as balloted
Superclean
Line Item 3Correct some technical errors and reference errorPassed as balloted
Superclean
#6091Line Item Revision to SEMI E174-1116: SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)6091_BallotReport.pdf6091_BallotReport.pdf
Line Item 1Replace old mnemonic “WFJOBJReport” with new mnemonic “WJReport”.Passed as balloted
Superclean
Line Item 2Align terminologies and wordings with SEMI E133Passed as balloted
Superclean
Line Item 3Improve Abbreviations and Acronyms.Passed as balloted
Superclean
Line Item 4Improve SEMI Standards references.Passed as balloted
Superclean
Line Item 5Move figure to appropriate section and add explanations on WJ and WFJ.Passed as balloted
Superclean
Line Item 6Move figures to appropriate sections and improve explanations of PJG and EXG.Passed as balloted
Superclean
Line Item 7Make WJFlow optional and improve explanationsPassed as balloted
Superclean
Line Item 8Add explanations to figures in Potential Use CasesPassed as balloted
Superclean
Line Item 9Add Response Information to WFJEvent and WJReport services.Passed as balloted
Superclean
Line Item 10Improve expressions and explanations.Passed as balloted
Superclean
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
Listing of all revised or new SNARF(s) approved by the Originating TC Chapter.
#
SC/TF/WG
Details
TBDGEM300 TFLine Item Revision to SEMI E170-mmyy: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS), SEMI E170.1-mmyy: SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM and SEMI E5-mmyy: SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)
-Equipment Data Acquisition Working Group To discuss Equipment Data Acquisition Standards
Leader: Mitch Sakamoto (Zama Consulting)
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:

http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)

Information on other upcoming meetings, programs, workshops, STEPs, and other events.

The I&C NA TC Chapter submitted #6116: Reapproval for SEMI E54.17-0812, Specification of Sensor/Actuator Network for A-LINK for Cycle 2 and the ballot result was reviewed and failed at the I&C NA TC Chapter meeting on April 5, 2017.Then NA TC Chapter found out that E54.17 was firstly developed by the I&C Japan TC Chapter. So, the Japan TC Chapter decided to conduct five-year-review for the document.


Next Meeting
The next meeting will be held as follows:
Date: Thursday, June 8
Time: 14:00-17:00
Location: SEMI Japan office