SEMI International Standards
Standards Locale: Japan |
Committee: Metrics |
Place of Meeting: SEMI Japan office, Tokyo, Japan |
Date of Meeting: 09/04/2020 |
Meeting End Date: 09/04/2020 |
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Recording SEMI Standards Staff: Chie Yanagisawa |
CER Posted to Web: 09/18/2020 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
6578 | Revision to SEMI E10-0814E
SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION | Failed and returned to TF for rework | 6578_BallotReport_v3.pdf |
6579 | Revision to SEMI E79-0814E
SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT PRODUCTIVITY | Failed and returned to TF for rework | 6579_BallotReport_v3.pdf |
6599 | Line-Item Revision to SEMI E180-1219,
TEST METHOD FOR MEASURING SURFACE METAL CONTAMINATION THROUGH ICP-MS OF CRITICAL CHAMBER COMPONENTS USED IN SEMICONDUCTOR WAFER PROCESSING | -- | 6599_BallotReport_v2.pdf |
Line Item 1 | SEMI E180 - To clarify what is discarded after the extraction solution is collected | Passed as balloted | -- |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
Standard Designation | Title |
None | *There is no published Standards originated by the Japan TC Chapter. |
Special Announcements of the Committee (Workshops, Programs, etc.)
The Metrics Japan TC Chapter conducted a simulation of an Official Virtual TC Chapter Meeting during Ballot Review section of this meeting.
The Metrics Japan TC Chapter to choose opt-in for Official Virtual TC Chapter meeting.
Next Meeting
TBD
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