SEMI International Standards
Standards Locale: North America |
Committee: EHS |
Place of Meeting: SEMI HQ, Milpitas, CA |
Date of Meeting: 11/07/2019 |
Meeting End Date: 11/07/2019 |
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Recording SEMI Standards Staff: Kevin Nguyen |
CER Posted to Web: 11/08/2019 |
Leadership Changes
None.
Committee Structure Changes
Previous WG/TF/SC Name | New WG/TF/SC Name or Status Change |
Pressure Guidelines for S2 Task Force
· Leader – Bert Planting (ASML)
| New Task Force |
Ballot Results
Document # | Document Title | Committee Action |
6171A | Line Item Revisions to SEMI S2-0818E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Oxygen Deficiency) | |
Line Item 1 | Revisions Related to Oxygen Deficiency Assessment Criteria | Failed and returned to TF for rework |
6551 | Line Item Revisions to SEMI S2-0818E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Mechanical Handling) | |
Line Item 1 | Deletion of criteria titled Subsequently Produced Lifting Equipment as noted in Section 18.7.5 in its entirety | Failed and returned to TF for rework |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
6439 | SNARF | Restriction of Materials TF | SNARF was revised from “New Standard: Specification for PFOA Restriction in Fluoromaterials” to “ New Standard: Practice for PFOA Restriction in Fluoromaterials” |
6593 | SNARF | S2 Mechanical Design TF | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
(Revision to Section 18 Mechanical Design) |
6594 | SNARF | Fire Protection TF | Line Item Revision to SEMI S14 Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
(Risk Ranking Criteria and Title) |
6595 | SNARF | Fire Protection TF | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
(Adding Guidance for Materials of Construction Evaluation Related to Fire Risk Assessment) |
Authorized Ballots
# | When | TF | Details |
6354A | Cycle 9-19, 1 or 2-20 | S2 Korean High Pressure Gas Safety TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
· Addition of related information |
6049B | Cycle 9-19, 1 or 2-20 | S10 Revision TF | Line Item Revision to SEMI S10-0815E, Safety Guideline for Risk Assessment and Risk Evaluation Process |
6171B | Cycle 9-19, 1 or 2-20 | Chemical Exposure TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
· Chemical exposure |
6439 | Cycle 9-19, 1 or 2-20 | Restriction of Materials TF | New Standard: Practice for PFOA Restriction in Fluoromaterials |
6593 | Cycle 9-19, 1 or 2-20 | S2 Mechanical Design TF | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
(Revision to Section 18 Mechanical Design) |
6594 | Cycle 9-19, 1 or 2-20 | Fire Protection TF | Line Item Revision to SEMI S14 Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
(Risk Ranking Criteria and Title) |
6595 | Cycle 9-19, 1 or 2-20 | Fire Protection TF | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
(Adding Guidance for Materials of Construction Evaluation Related to Fire Risk Assessment) |
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
5957 | Control of Hazardous Energy (CoHE) TF | Line Item Revision of S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. ( Re: Control of Hazardous Energy | Nov 7, 2020 |
6049 | S10 Revision TF | Line-Item Revision to SEMI S10-0815E Safety Guideline for Risk Assessment and Risk Evaluation Process | Nov 7, 2020 |
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
March 31-April 2, 2020 at SEMI HQ in conjunction with SEMI NA Spring Meetings. Check www.semi.org/standards for latest information.
Tentative schedule is listed below.
March 31
April 1
April 2
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