SEMI International Standards
Standards Region: North America
Committee: EHS
Place of Meeting: SEMI HQ, Milpitas, CA
Date of Meeting: 11/07/2019
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 11/08/2019


Leadership Changes
None.

Committee Structure Changes

Previous WG/TF/SC Name
New WG/TF/SC Name or Status Change
Pressure Guidelines for S2 Task Force
    Leader – Bert Planting (ASML)
New Task Force


Ballot Results

Document #
Document Title
Committee Action
6171ALine Item Revisions to SEMI S2-0818E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Oxygen Deficiency)
Line Item 1Revisions Related to Oxygen Deficiency Assessment CriteriaFailed and returned to TF for rework
6551Line Item Revisions to SEMI S2-0818E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Mechanical Handling)
Line Item 1Deletion of criteria titled Subsequently Produced Lifting Equipment as noted in Section 18.7.5 in its entiretyFailed and returned to TF for rework



Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6439SNARFRestriction of Materials TFSNARF was revised from “New Standard: Specification for PFOA Restriction in Fluoromaterials” to “ New Standard: Practice for PFOA Restriction in Fluoromaterials”
6593SNARFS2 Mechanical Design TFLine Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
(Revision to Section 18 Mechanical Design)
6594SNARFFire Protection TFLine Item Revision to SEMI S14 Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
(Risk Ranking Criteria and Title)
6595SNARFFire Protection TFLine Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
(Adding Guidance for Materials of Construction Evaluation Related to Fire Risk Assessment)


Authorized Ballots

#
When
TF
Details
6354ACycle 9-19, 1 or 2-20S2 Korean High Pressure Gas Safety TFLine Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Addition of related information
6049BCycle 9-19, 1 or 2-20S10 Revision TFLine Item Revision to SEMI S10-0815E, Safety Guideline for Risk Assessment and Risk Evaluation Process
6171BCycle 9-19, 1 or 2-20Chemical Exposure TFLine Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Chemical exposure
6439Cycle 9-19, 1 or 2-20Restriction of Materials TFNew Standard: Practice for PFOA Restriction in Fluoromaterials
6593Cycle 9-19, 1 or 2-20S2 Mechanical Design TFLine Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
(Revision to Section 18 Mechanical Design)
6594Cycle 9-19, 1 or 2-20Fire Protection TFLine Item Revision to SEMI S14 Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
(Risk Ranking Criteria and Title)
6595Cycle 9-19, 1 or 2-20Fire Protection TFLine Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
(Adding Guidance for Materials of Construction Evaluation Related to Fire Risk Assessment)



SNARF(s) Granted a One-Year Extension

#
TF
Title
Expiration Date
5957Control of Hazardous Energy (CoHE) TFLine Item Revision of S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. ( Re: Control of Hazardous EnergyNov 7, 2020
6049S10 Revision TFLine-Item Revision to SEMI S10-0815E Safety Guideline for Risk Assessment and Risk Evaluation ProcessNov 7, 2020


SNARF(s) Abolished

#
TF
Title
6551S2 Mechanical Design TFLine Item Revisions to SEMI S2-0818E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Mechanical Handling)
5970Fire Protection TFLine Item Revisions to SEMI S14, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment (pertaining to alignment with SEMI S10 )
6099S22 Revision TFLine Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment


Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
March 31-April 2, 2020 at SEMI HQ in conjunction with SEMI NA Spring Meetings. Check www.semi.org/standards for latest information.
Tentative schedule is listed below.

March 31



April 1



April 2