SEMI International Standards
Standards Locale: North America
Committee: Metrics
Place of Meeting: SEMI HQ
Date of Meeting: 11/08/2017
Meeting End Date: 11/08/2017
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 11/16/2017


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
ESD/ESC Task Force co-leaderNewRussell Fitzpatrick (Applied Materials)
Equipment RAMP Task Force co-leaderNewRussell Fitzpatrick (Applied Materials)


Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
R5596A
New Standard: Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing EnvironmentApproved for publication R5596A_Procedural Review.pdfR5596A_Procedural Review.pdf
6144A
Line- items
[1-4]
Line-item Revision to SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery SystemsPassed6144A Procedural Review.pdf6144A Procedural Review.pdf
6145A
Line- items
[1-5]
Line-item Revision to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing EquipmentPassed6145A Procedural Review.pdf6145A Procedural Review.pdf
6146A
Line- items
[1-8]
Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery SystemsPassed6146A Procedural Review.pdf6146A Procedural Review.pdf
6241
Reapproval of SEMI E113-306 (Reapproved 0512), Specification for Semiconductor Processing Equipment RF Power Delivery SystemsPassed6241 Procedural Review.pdf6241 Procedural Review.pdf
6242
Reapproval of SEMI E136-1104 (Reapproved 0512), Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery SystemsPassed6242 Procedural Review.pdf6242 Procedural Review.pdf
6243
Reapproval of SEMI E143-0306 (Reapproved 0512), Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at Any Phase AnglePassed6243 Procedural Review.pdf6243 Procedural Review.pdf


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots

#
When
TF
Details
6184Cycle
9-2017		RF Measurements TFRevision to SEMI E135-0704 (Reapproved 0512), Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

Next Meeting Standards Spring 2018 Meetings - SEMI HQ, Milpitas, CA


    Tuesday, April 10, 2018 (Tentative)

      · ESD/ESC TF (13:30 – 15:30)

      · EMC TF (17:00 – 18:00)


    Wednesday, April 11, 2018 (Tentative)

      · Equipment RAMP Metrics TF (9:00 – 11:00)

      · RF Measurements TF (12:30-14:30)

      · Metrics NA TC Chapter (15:00 – 18:00)