SEMI International Standards
| Standards Locale: North America |
| Committee: Liquid Chemicals |
| Place of Meeting: SEMI Headquarters, Milpitas, California/USA |
| Date of Meeting: 04/05/2023 |
| Meeting End Date: 04/05/2023 |
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| Recording SEMI Standards Staff: Laura Nguyen |
| CER Posted to Web: 04/19/2023 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| Chemical Mechanical Planarization Consumables (CMP-C) TF | Alexander Tregub (Intel) | Alexander Tregub (Consultant)
Michael Mills (DuPont) [New] |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| 6715 | New Standard, Guide for Measuring Particle Precursors in Ultrapure Water | Passed, with technical changes. Ratification Ballot to be issued. |  6715_ProceduralReview.pdf |
| 6828C | Revision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems | Failed | |
| 7007 | Reapproval of SEMI C21-0618, Specification and Guide for Ammonium Hydroxide | Failed | |
| 7008 | Reapproval of SEMI C28-0618, Specification and Guide for Hydrofluoric Acid | Failed | |
| 7009 | Reapproval of SEMI C29-0618, Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) | Failed | |
| 7010 | Reapproval of SEMI C35-0118, Specification and Guide for Nitric Acid | Failed | |
| 7011 | Reapproval of SEMI C40-1110 (Reapproved 0618), Specification for Potassium Hydroxide, 45% Solution | Failed | |
| 7012 | Reapproval of SEMI C41-0618, Specification and Guide for 2-Propanol | Failed | |
| 7013 | Reapproval of SEMI C45-05185, Specification and Guide for Tetraethylorthosilicate (TEOS) | Failed | |
| 7014 | Reapproval of SEMI C62-0309 (Reapproved 0618), Specification for Progen Precursors Used in Low K CVD Processes | Failed | |
| 7015 | Reapproval of SEMI C63-1108 (Reapproved 0618), Specification for Organosilicate Precursors Used in Low K CVD Processes | Failed | |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| 7006 | SNARF | High Purity Polymer Materials and Components TF | Revision to SEMI C69-1015 (Reapproved 1220), Test Method for the Determination of Surface Areas of Polymer Pellets
– TC Member Review took place between 12/07/2022-12/20/2022
– Approved by GCS on 01/10/2023 |
Authorized Activities
Listing of all revised or new SNARF(s) approved by the Originating TC Chapter.
# | Type | SC/TF/WG | Details |
| 7086 | SNARF | Ultra Pure Water TF | Revision to SEMI F61–0521, Guide for Design and Operation of a Semiconductor Ultrapure Water System |
| 7087 | SNARF | Ultra Pure Water TF | Revision to SEMI F63-0521, Guide for Ultrapure Water Used in Semiconductor Processing |
| 7088 | SNARF | Ultra Pure Water TF | Revision to SEMI F75-0521, Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing |
| 7089 | SNARF | High Purity Polymer Materials and Components TF | Line-item revision to SEMI C78-0113 (RA 1218), Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy |
| 7090 | SNARF | High Purity Polymer Materials and Components TF | Line-Item Revision to SEMI C87-0515, Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Contact Profilometry |
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| 6315C | Cycle 4, or 5-2023 | Chemical Analytical Methods TF | Revision to SEMI C30-0218, Specification for Hydrogen Peroxide, with title change to: Specification and Guide for Hydrogen Peroxide |
| 6388B | Cycle 4, or 5-2023 | Chemical Analytical Methods TF | Revision to SEMI C44-0618, Specification and Guide for Sulfuric Acid |
| 6713 | Cycle 4, or 5-2023 | High Purity Polymer Materials and Components TF | Revision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems |
| 6828D | Cycle 5-2023 | High Purity Liquid Assemblies & Systems TF | Revision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems |
| 6917 | Cycle 5-2023 | High Purity Liquid Assemblies & Systems TF | Revision to SEMI F39-0621, Guide for Chemical Blending Systems |
| 6993 | Cycle 4, or 5-2023 | Water Management TF | Line-Item Revision to SEMI F98-0618, Guide for Water Reuse in Semiconductor Industry |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for the week of July 10-13, in conjunction with SEMICON West 2023. Schedule details TBD. Please check www.semi.org/standards for updates.
Tentative Schedule:
·Monday, July 10
·Tuesday, July 11
o 9:00-10:00, UPW TF
o 10:00-11:00, Water Management TF
o 11:00-12:00, High Purity Polymer Material & Components TF
o ?? 13:00-14:00 Statistical Methods TF
o 14:00-16:00 Liquid Chemicals NA TC Chapter Meeting – Day 1
·Wednesday, July 12
o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting – Day 2
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