SEMI International Standards
Standards Locale: North America |
Committee: Liquid Chemicals |
Place of Meeting: SEMI HQ, San Jose, California |
Date of Meeting: 11/08/2016 |
Meeting End Date: 11/08/2016 |
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Recording SEMI Standards Staff: Inna Skvortsova |
CER Posted to Web: 11/22/2016 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
6084 | Revision to SEMI C93-0216, Guide For Determining Ion Exchange Resin. | Passed | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | Task Force | Details |
5943 | SNARF | HPLA&S | Revistion to SEMI E49.2-1104, Guide for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment.
Target to ballot in Cycle 1, 2017 |
5942 | SNARF | HPLA&S | Revision to SEMI E49.4-0298, Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment
Target to ballot in Cycle 1, 2017 |
6085 | SNARF | HPPM&C | Revision to SEMI F57- 0314, Specification for High Purity Polymer Materials and Components Uses in Ultrapure Water and Liquid Chemical Distribution Systems.
Ongoing work with preliminary ballot target by July 2017 |
6086 | SNARF | UPW | Revision to SEMI F75-1102, Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing
Ballot in cycle 9-16 or Cycle 1 2017 |
TBD | SNARF | UPW | Revision to SEMI F61-0301 (Reapproved 0309), Guide for Ultrapure Water System Used in Semiconductor Processing
New SNARF for GCS approval. Target to ballot in Cycle 1-17 and adjudicate at Semicon West 2017 |
TBD | SNARF | UPW | Revision to SEMI F98-0305, Guide for Treatment of Reuse Water in Semiconductor Processing
New SNARF GCS approval. |
4957 | SNARF | CAM | Revision to SEMI C41-0705, Specifications and Guidelines for 2-Propanol, with Title Change To: Specifications FOR 2-Propanol
SNARF (previously extended till 7/2017) needs title change. |
TBD | SNARF | TBD | Revision to SEMI C62-0309, Specification for Porogen Precursors Used in Low K CVD Processes
New SNARF for GCS approval |
TBD | SNARF | TBD | Revision to SEMI C63-1108, Specification for Organosilicate Precursors Used in Low K CVD Processes
New SNARF for CGS approval |
TBD | SNARF | TBD | Reapproval for SEMI C41-0705, Specifications and Guidelines for 2-Propanol.
New SNARF for 4/2017 TC meeting review. |
Authorized Ballots
# | When | Task Force | Details |
6086 | Cycle 9-2016 or Cycle 1/2-2017 | UPW | Revision to SEMI F75-1102, Guide For Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing |
5943 | Cycle 1/2-2017 | HPLA&S | Revistion to SEMI E49.2-1104, Guide for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment. |
5942 | Cycle 1/2-2017 | HPLA&S | Revision to SEMI E49.4-0298, Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
Slava Libman reported on SCIS and IRDS collaborative activities related to UPW and yield enhancement, including review of the White Paper draft.
Next Meeting
Monday, April 3 2017; SEMI HQ office
o UPW Task Force (8AM - 11AM)
- F61 – UPW Systems Guidelines;
- F75 – UPW Monitoring;
- C79 – UPW Filtration Efficiency;
- F98 – Water Reuse;
- UPW Quality - F63 Revision;
o High Purity Liquid Assemblies and Systems TF (1PM - 3PM)
Tuesday, April 4 2017; SEMI HQ office
o High Purity Polymer Materials & Components (8AM – 9:30AM)
o Chemical Analytical Methods TF (11AM - noon)
o Liquid Chemicals TC Chapter (3PM - 6PM)
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