SEMI International Standards
Standards Locale: North America
Committee: Liquid Chemicals
Place of Meeting: SEMI HQ, San Jose, California
Date of Meeting: 11/08/2016
Meeting End Date: 11/08/2016
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 11/22/2016


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6084Revision to SEMI C93-0216, Guide For Determining Ion Exchange Resin.Passed


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
Task Force
Details
5943SNARFHPLA&SRevistion to SEMI E49.2-1104, Guide for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment.
Target to ballot in Cycle 1, 2017
5942SNARFHPLA&SRevision to SEMI E49.4-0298, Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment
Target to ballot in Cycle 1, 2017
6085SNARFHPPM&CRevision to SEMI F57- 0314, Specification for High Purity Polymer Materials and Components Uses in Ultrapure Water and Liquid Chemical Distribution Systems.
Ongoing work with preliminary ballot target by July 2017
6086SNARFUPW Revision to SEMI F75-1102, Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing
Ballot in cycle 9-16 or Cycle 1 2017
TBDSNARFUPW Revision to SEMI F61-0301 (Reapproved 0309), Guide for Ultrapure Water System Used in Semiconductor Processing
New SNARF for GCS approval. Target to ballot in Cycle 1-17 and adjudicate at Semicon West 2017
TBDSNARFUPW Revision to SEMI F98-0305, Guide for Treatment of Reuse Water in Semiconductor Processing
New SNARF GCS approval.
4957SNARFCAM Revision to SEMI C41-0705, Specifications and Guidelines for 2-Propanol, with Title Change To: Specifications FOR 2-Propanol
SNARF (previously extended till 7/2017) needs title change.
TBDSNARFTBDRevision to SEMI C62-0309, Specification for Porogen Precursors Used in Low K CVD Processes
New SNARF for GCS approval
TBDSNARFTBDRevision to SEMI C63-1108, Specification for Organosilicate Precursors Used in Low K CVD Processes
New SNARF for CGS approval
TBDSNARFTBDReapproval for SEMI C41-0705, Specifications and Guidelines for 2-Propanol.
New SNARF for 4/2017 TC meeting review.


Authorized Ballots

#
When
Task Force
Details
6086Cycle 9-2016 or Cycle 1/2-2017UPWRevision to SEMI F75-1102, Guide For Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing
5943Cycle 1/2-2017HPLA&SRevistion to SEMI E49.2-1104, Guide for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment.
5942Cycle 1/2-2017HPLA&SRevision to SEMI E49.4-0298, Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
Slava Libman reported on SCIS and IRDS collaborative activities related to UPW and yield enhancement, including review of the White Paper draft.

Next Meeting

Monday, April 3 2017; SEMI HQ office

      o UPW Task Force (8AM - 11AM)
        - F61 – UPW Systems Guidelines;
        - F75 – UPW Monitoring;
        - C79 – UPW Filtration Efficiency;
        - F98 – Water Reuse;
        - UPW Quality - F63 Revision;
      o High Purity Liquid Assemblies and Systems TF (1PM - 3PM)
Tuesday, April 4 2017; SEMI HQ office
      o High Purity Polymer Materials & Components (8AM – 9:30AM)
      o Chemical Analytical Methods TF (11AM - noon)
      o Liquid Chemicals TC Chapter (3PM - 6PM)