SEMI International Standards
Standards Locale: North America
Committee: Liquid Chemicals
Place of Meeting: San Francisco, CA, USA
Date of Meeting: 07/12/2016
Meeting End Date: 07/12/2016
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 07/28/2016


Leadership Changes

Group
Previous Leader
New Leader
NA TC Chapter Don Hadder (Intel) - TC Chapter Co-chair
Ultra Pure Water TFnoneBob McIntosh (GF Piping); Slava Libman (Air Liquide)
High Purity Polymer Materials & Components TFnoneBob McIntosh (GF Piping)
High Purity Liquid Assemblies & Systems TFnoneKoh Murai (Mega Fluid Systems)
Chemical Analytical Methods TFnoneDon Hadder (Intel), Frank Flowers (PeroxyChem)
.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5944ARevision to SEMI F63-0213, GUIDE FOR ULTRAPURE WATER USED IN SEMICONDUCTOR PROCESSINGpassed 5944A_Procedural Review.pdf5944A_Procedural Review.pdf
5992Revision to SEMI F41-0699, GUIDE FOR QUALIFICATION OF A BULK CHEMICAL DISTRIBUTION SYSTEM USED IN SEMICONDUCTOR PROCESSINGpassed 5992_Procedural Review.pdf5992_Procedural Review.pdf


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
TBDSNARFUPW TF (former IX Resin TF)Revision to SEMI C93-0216, GUIDE FOR DETERMINING ION EXCHANGE RESIN. To be distributed for 2-week TC Member review
Ballot in cycle 7-16.
TBDSNARFHigh Purity Polymer Materials and Components TFRevision to SEMI F57- 0314, SPECIFICATION FOR HIGH PURITY POLYMER MATERIALS AND COMPONENTS USES IN ULTRAPURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS.
To be distributed for 2-week TC Member review
TBDSNARFUPW TFRevision to SEMI F75-1102, GUIDE FOR QUALITY MONITORING OF ULTRAPURE WATER USED IN SEMICONDUCTOR MANUFACTURING
To be distributed for 2-week TC Member review;
Ballot in cycle 9-16.
4957SNARFAnalytical Methods Task ForceRevision to SEMI C41-0705, SPECIFICATIONS AND GUIDELINES FOR 2-PROPANOL, WITH TITLE CHANGE TO: SPECIFICATIONS FOR 2-PROPANOL
SNARF Extended for 1 year
5642SNARFAnalytical Methods Task ForceRevision to SEMI C35-0708, SPECIFICATIONS AND GUIDELINE FOR NITRIC ACID WITH TITLE CHANGE TO: SPECIFICATION AND GUIDE FOR NITRIC ACID
SNARF extended for 1 year
5416SNARFSEMI F104 Rewrite TaskForceRevision of SEMI F104-0312, PARTICLE TEST METHOD GUIDE FOR EVALUATION OF COMPONENTS USED IN ULTRAPURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS
SNARF abolished
5527SNARFSEMI F40 Rewrite Task ForceRevision to SEMI F40-0699E, PRACTICE FOR PREPARING LIQUID CHEMICAL DISTRIBUTION COMPONENTS FOR CHEMICAL TESTING
SNARF abolished
TFOF not specifiedRevision to TFOF title (add Purity):
HIGH PURITY POLYMER MATERIALS AND COMPONENTS TASK FORCE
TFOF UPWRevision to TFOF (charter and scope change):
ULTRAPURE WATER (UPW) TASK FORCE
TFOFHigh Purity Liquid Assemblies & SystemsRevision to TFOF (charter and scope change to include all E49.x):
HIGH PURITY LIQUID ASSEMBLIES & SYSTEMS
TFOFRoughness of Polymer Surfaces TFTF disbanded
TFOFF40 TFTF disbanded. Activities moved to High Purity Polymer Materials & Components
TFOFF63 TFTF disbanded. Activities moved to UPW TF
TFOFAnalytical Methods TFRevision to TFOF (name, charter, and scope) to:
CHEMICAL ANALYTICAL METHODS TF


Authorized Ballots

#
When
SC/TF/WG
Details
TBDCycle 7-16 UPWRevision to SEMI C93-0216, GUIDE FOR DETERMINING ION EXCHANGE RESIN. TO BE DISTRIBUTED FOR 2-WEEK TC MEMBER REVIEW.
TBDCycle 9-16UPWRevision to SEMI F75-1102, GUIDE FOR QUALITY MONITORING OF ULTRAPURE WATER USED IN SEMICONDUCTOR MANUFACTURING


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)


#
Type
SC/TF/WG
Details
4957SNARFAnalytical Methods Task ForceSNARF extended for 1 year
5642SNARFAnalytical Methods Task ForceSNARF extended for 1 year


Next Meeting

    Monday, November 7; SEMI HQ office, San Jose CA.
        UPW Task Force (8AM - 11AM)
        - F061-UPW Systems Guidelines;
        - F75 – UPW Monitoring;
        - C79 – UPW Filtration Efficiency;
        - F93 Ion Exchange (IX) Resin;
        - UPW Quality - F63 Revision;
        E49.4 / E49.5 Evaluation (2PM - 3PM)
    Tuesday, November 8 ; SEMI HQ office, San Jose CA.
        High Purity Polymer Materials & Components - SEMI F57 rewrite (9AM - 11AM)
        Chemical Analytical Methods TF (11AM - noon)
        Liquid Chemicals TC Chapter (3PM - 6PM)