SEMI International Standards
| Standards Locale: North America |
| Committee: Information & Control |
| Place of Meeting: SEMI Headquarters in San Jose, California |
| Date of Meeting: 04/02/2014 |
| Meeting End Date: 04/02/2014 |
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| Recording SEMI Standards Staff: Paul Trio |
| CER Posted to Web: 04/15/2014 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| Cycle 8, 2013 Ballots | | |
5274B | Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard | Failed, to be reballoted |  |
5650 | Line Item Revisions to SEMI E133-0212, Specification for Automated Process Control Systems Interface | |  |
Line Item 1 | Abbreviation correction | Passed with editorial changes | |
Line Item 2 | Incorrect table references and placement of tables | Passed as balloted | |
Line Item 3 | Incorrect figure reference | Passed as balloted. Superclean | |
| Cycle 1, 2014 Ballots | | |
5678 | Reapprovals for SEMI E39-0703 (Reapproved 1109), Object Services Standard: Concepts, Behavior, and Services and SEMI E39.1-0703 (Reapproved 1109), SECS-II Protocol for Object Services Standard (OSS) | Passed as balloted |  |
5679 | Reapproval for SEMI E91-0600 (Reapproved 1109), Specification for Prober Specific Equipment Model (PSEM) | Failed, to be reballoted |  |
5680 | Reapproval for SEMI E148-1109, Specification for Time Synchronization and Definition of the TS-Clock Object | Passed as balloted. Superclean |  |
| Cycle 2, 2014 Ballots | | |
5619 | Line Item Revision to Add New GEM Additional Capability: SECS Equipment Data Dictionary (SEDD), and Complementary Files to SEMI E30-0611, Generic Model for Communications and Control of Manufacturing Equipment (GEM) | |  |
Line Item 1 | SECS Equipment Data Dictionary | Failed, to be reballoted | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the committee.
# | Type | SC/TF/WG | Details |
5589 | Revised SNARF | GEM300 TF | Revisions to:
- SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II);
- SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM);
- SEMI E30.1, Inspection and Review Specific Equipment Model (ISEM);
- SEMI E40.1, SECS-II Support for Processing Management Standard;
- SEMI E82, Specification for Interbay/Intrabay AMHS SEM (IBSEM);
- SEMI E87.1, Provisional Specification for SECS-II Protocol for Carrier Management (CMS);
- SEMI E88, Specification for AMHS Storage SEM (Stocker SEM);
- SEMI E90.1, Specification for SECS-II Protocol Substrate Tracking;
- SEMI E91, Specification for Prober Specific Equipment Model (PSEM);
- SEMI E94.1, Specification for SECS-II Protocol for Control Job Management (CJM);
- SEMI E109, Specification for Reticle and Pod Management (RPMS);
- SEMI E109.1, Specification for SECS-II Protocol for Reticle and Pod Management (RPMS);
- SEMI E116.1, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT);
- SEMI E122, Standard for Tester Equipment Specific Equipment Model (TSEM);
- SEMI E122.1, Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM);
- SEMI E123, Standard for Handler Equipment Specific Equipment Model (HSEM);
- SEMI E123.1, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM);
- SEMI E138, XML Semiconductor Common Components; and
- SEMI E153, Specification for AMHS SEM (AMHS SEM)
Remove references and content related to SML and SML Notation.
Updated list of Standards to be revised.
- SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II);
- SEMI E40.1, SECS-II Support for Processing Management Standard;
- SEMI E90.1, Specification for SECS-II Protocol Substrate Tracking;
- SEMI E94.1, Specification for SECS-II Protocol for Control Job Management (CJM);
- SEMI E109, Specification for Reticle and Pod Management (RPMS);
- SEMI E109.1, Specification for SECS-II Protocol for Reticle and Pod Management (RPMS);
- SEMI E116.1, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT);
One ballot is limited to 10 line items, one line item per standard. Therefore, the task force plans to perform corresponding revisions in phases. Additional SNARF(s) will be submitted as this revision effort progresses. |
5716 | SNARF | Process Control System (PCS) TF | Revisions to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS)
Adjustments are needed to existing E133 and E133.1 standards content to better align with the XML guidelines document, as necessary. Technical changes are needed to clarify the implementation of the PCS analysis engine type. SEMI E133.1 still contain the term “Provisional” that is no longer used in SEMI Standards. |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents approved by the committee for letter ballot.
# | When | SC/TF/WG | Details |
| 5507A | Cycle 3, 2014
(or C4-14) | Diagnostic Data Acquisition (DDA) TF | Line Item Revisions to:
- SEMI E120-0310, Specification for the Common Equipment Model (CEM);
- SEMI E120.1-0310, XML Schema for the Common Equipment Model (CEM);
- SEMI E125-0710, Specification for Equipment Self Description (EqSD);
- SEMI E125.1-0710, Specification for SOAP Binding for Equipment Self Description (EQSD);
- SEMI E128-0310, Specification for XML Message Structures;
- SEMI E132-0310E2, Specification for Equipment Client Authentication and Authorization;
- SEMI E132.1-0310, Specification for SOAP Binding for Equipment Client Authentication and Authorization (ECA);
- SEMI E134-0813, Specification for Data Collection Management;
- SEMI E134.1-0813, Specification for SOAP Binding of Data Collection Management (DCM);
- SEMI E138-0709, XML Semiconductor Common Components;
- SEMI E145-0213, Classification for Measurement Unit Symbols in XML; and
- SEMI E164-0313, Specification for EDA Common Metadata;
E132 line item rework. |
| 5677 | Cycle 3, 2014
(or C4-14) | Diagnostic Data Acquisition (DDA) TF | Revision to SEMI E164, Specification for EDA Common Metadata |
| 5508 | Cycle 3, 2014
(or C4-14) | GEM300 TF | Revisions to:
- SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II);
- SEMI E90, Specification for Substrate Tracking; and
- SEMI E90.1, Specification for SECS-II Protocol Substrate Tracking |
| 5589A | Cycle 3, 2014
(or C4-14) | GEM300 TF | Revisions to:
- SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II);
- SEMI E40.1, SECS-II Support for Processing Management Standard;
- SEMI E90.1, Specification for SECS-II Protocol Substrate Tracking;
- SEMI E94.1, Specification for SECS-II Protocol for Control Job Management (CJM);
- SEMI E109, Specification for Reticle and Pod Management (RPMS);
- SEMI E109.1, Specification for SECS-II Protocol for Reticle and Pod Management (RPMS); and
- SEMI E116.1, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT);
Remove references and content related to SML and SML Notation. |
| 5619A | Cycle 3, 2014
(or C4-14) | GEM300 TF | Line Item Revision to Add New GEM Additional Capability: SECS Equipment Data Dictionary (SEDD), and Complementary Files to SEMI E30-0611, Generic Model for Communications and Control of Manufacturing Equipment (GEM) |
| 5620 | Cycle 3, 2014
(or C4-14) | GEM300 TF | Revision to SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II) and New Complementary File: SECS-II Message Notation using XML |
| 5716 | Cycle 3, 2014
(or C4-14) | Process Control System (PCS) TF | Revisions to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS)
Adjustments are needed to existing E133 and E133.1 standards content to better align with the XML guidelines document, as necessary. Technical changes are needed to clarify the implementation of the PCS analysis engine type. SEMI E133.1 still contain the term “Provisional” that is no longer used in SEMI Standards. |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
SEMI E54.9 to Inactive Status
At the North America (NA) Standards Spring 2014 Meetings, the NA I&C Committee agreed to allow SEMI E54.9 (Specification for Sensor/Actuator Network Communication for Modbus/TCP Over TCP/IP) to go into Inactive Status.
Note: Per section 4.2.19 of the SEMI Standards Regulations, Inactive Status is used to describe a Standard or Safety Guideline that is not currently supported by the global technical committee. Inactive Standards and Inactive Safety Guidelines are still available from SEMI. Inactive Standards and Inactive Safety Guidelines contain an ‘Inactive’ watermark, but will still be available in the ‘Current Standards’ section of the SEMI Web site.
Discontinued SNARFs
The NA I&C also approved the discontinuation of the following activities:
a) SNARF # 5003
Revisions to:
- SEMI E125, Specification for Equipment Self Description (EqSD)
- SEMI E128, Specification for XML Message Structures
- SEMI E132, Specification for Equipment Client Authentication and Authorization
- SEMI E134, Specification for Data Collection Management
For reliable messaging for EDA Standards
b) SNARF # 5100
Revision to SEMI E132, Specification for Equipment Authorization and Authentication. For introducing the new capability: client password
c) SNARF #5510
Revision to SEMI E157, Specification for Module Process Tracking. For corrections and to include more detailed explanation to improve future implementations of SEMI E157.
Next Meeting
North America Standards Meetings at SEMICON West 2014
July 7-10, 2014
San Francisco Marriott Marquis Hotel
780 Mission Street
San Francisco, California 94103
U.S.A.
Monday, July 7
- I&C Leadership (11:00 AM to 12:00 Noon)
- Diagnostic Data Acquisition [DDA] TF (1:00 PM to 3:00 PM)
Tuesday, July 8
- GEM300 TF (8:00 AM to 3:00 PM)
- Energy Saving Equipment Communication [ESEC] TF (9:00 AM to 12:00 Noon)
- Sensor Bus TF (1:00 PM to 3:00 PM)
- Process Control System [PCS] TF (3:00 PM to 5:00 PM)
- I&C GCS (5:00 PM to 6:00 PM)
Wednesday, July 9
- I&C Committee (8:00 AM to 4:30 PM)
For more information, please visit: http://www.semi.org/en/node/49446
For more information about SEMICON West 2014, please visit: http://www.semiconwest.org
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